Fukuda Co., Ltd.

Akimitsu Tanabe

Mao Hirata

Takaaki Watanabe

Tomoyuki Futami

A leak test condition design method includes obtaining an internal volume of a test piece and a remaining internal volume of a test piece capsule with the test piece loaded for a differential pressure based air leak test; determining a test air pressure to be applied into the test piece capsule when the differential pressure based air leak test is performed; determining bombing conditions of a helium leak test; obtaining a differential pressure value between a test piece and a master to be gained when the differential pressure based air leak test is performed and converting into an equivalent standard leak rate to derive a differential pressure conversion value; obtaining a helium leak rate of the test piece gained and converting into an equivalent standard leak rate to derive a helium leak rate conversion value; and displaying the derived differential pressure conversion value and helium leak rate conversion value.

Leak test condition design method, leak test condition design device, leak testing method, and leak testing device

The present invention provides a method for leak testing by which occurrence of fine leakage from a work as a test object can be determined without being affected by a released tracer gas that is also released from a non-defective work. The method for leak testing includes a series of steps including a gas bombing step wherein a work W as a test object is soaked in a pressurized tracer gas, a work setting step wherein the work subjected to the gas bombing is set in a hermetically sealed container, a vacuum suctioning step wherein the hermetically sealed containeris vacuum suctioned by a suction deviceand a measuring step wherein tracer gas measurement data are obtained by measuring a vacuum suctioned tracer gas with a detector. Tracer gas measurement data for a non-defective work are preliminarily obtained by performing the series of steps for the non-defective work having same specifications as the work W as the test object. The tracer gas measurement data for the work W as the test object are compared with the tracer gas measurement data for the non-defective work in the measuring step, and thereby, occurrence of fine leakage from the work as the test object is determined.

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Tokyo, Japan

Akimitsu Tanabe