Sumco Techxiv Corporation

Sumco Techxiv Kabushiki Kaisha

Akiko Noda

Tetsuhiro IIda

Junsuke Tomioka

Evaporated matters and reaction products produced in a furnace can be exhausted without contacting with a graphite crucible and a heater, and an exhaust pipe per se can be maintained at a high temperature to suppress the deposition and condensation of the evaporated matters and reaction products, whereby the clogging of the exhaust pipe is prevented, in addition, a conversion of the exhaust pipes per se into SiC is suppressed to improve the durability of the exhaust pipe, and the change in thermal expansion coefficient is suppressed, whereby a thermal single crystal can be pulled up in high quality. Further, the exhaust pipe is formed of a small number of materials to reduce a production cost. A heat shield () made of a heat insulating material is provided outside a heater (), and a plurality of exhaust pipes () are provided between the heater () and the heat shield (). The plurality of exhaust pipes () are communicated with a plurality of exhaust ports (B ()) provided at a bottom of a chamber

Semiconductor single crystal production device and producing method therefor

A semiconductor single crystal manufacturing apparatus which can manufacture a single crystal of high oxygen concentration to that of low oxygen concentration within a prescribed standard range of oxygen concentration, as a wafer material for semiconductor integrated circuits, with a high yield, is provided. Heat shieldsare provided in the entire annular area between respective adjacent heaters of the heatersfor heating the cruciblefrom the outside periphery side. By using the heat shieldsfor localizing the respective heating regions for the heaters to actively control the temperature distribution for the crucibleand meltin the crucible, a single crystal of high oxygen concentration to that of low oxygen concentration can be manufactured within a prescribed standard range of oxygen concentration with a high yield.

Growing community of inventors

Kanagawa, Japan

Akiko Noda