Espec Corporation

Akiko Kuse

Hiroshi Okuda

Hideki Tanaka

Hitoshi Ando

Kimio Yoshizumi

A temperature regulator has two headers connected to both ends of a heat receiving tube in which gas flows. The heat receiving tube has a heating element at the outer periphery thereof and a mixer accommodated therein to cause turbulent flow of gas passing through the heat receiving tube. The headers each have fins radially attached thereto, thereby ensuring strength of the headers and improving heat exchange efficiency.

Fluid heater and evaluation equipment incorporating the same

The present invention realizes (i) a gas flow measuring device which can measure a gas flow of a low-boiling gas in a mixed gas including two types of gasses having different boiling points, and (ii) a method of measuring a gas flow easily but highly precisely, using the gas flow measuring device. The gas flow measuring device includes a condensing tank for condensing a mixed gas in which two types of gasses having different boiling points are mixed with each other, and a flow meter for measuring the flow of the mixed gas. After condensing the mixed gas in the condensing tank so as to cause the gas flow of the high-boiling gas to be known, the flow is measured using the flow meter so that the gas flow of the low-boiling gas is worked out.

Growing community of inventors

Kawaguchi, Japan

Akiko Kuse