Ckd Corporation

Tokyo Electron Limited

Akihito Sugino

Akiko Nakada

Tsuneyuki Okabe

Minoru Ito

Hiroki Doi

Yoji Mori

Kazutoshi Itoh

Takeya Inagaki

Naoya Shiroyama

Keisuke Kato

A flow rate verification unit that uses the pressure variation value per unit time of a pressure measurement value measured by a pressure gauge and a temperature measurement value measured by a thermometer in a state where a second shut-off valve is closed to calculate the volume between a flow-rate control valve and the second shut-off valve and verifies the flow rates of mass flow controllers one at a time, wherein a first verification side connection part attachably and detachably connected to an integrated gas unit is provided upstream from the pressure gauge and a serially connected verification gas input valve, verification side mass flow controller, and verification side flow rate control valve are provided in parallel with the second shut-off valve.

Flow rate verification unit

A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system also includes a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas.

Flow verification system and flow verification method

To provide a purge gas unit and a purge gas supply integrated unit having a smaller foot space, the purge gas unit comprises an input block for input of purge gas into the purge gas unit, the input block including a purge passage formed through the input block to provide an opening in a side surface of the input block and an input passage formed branching off from the purge passage; an output block for output of the purge gas from the purge gas unit; a communication block connected to the input block and the output block to provide communication between the input block and the output block.

Purge gas unit and purge gas supply integrated unit

A flow rate verification failure diagnosis apparatus is applied to a gas supply pipe system including flow rate control devices and a flow rate verification unit for detecting flow rate abnormality by measuring flow rate of each of the flow rate control devices on the basis of pressure measured by a pressure measurement device. The flow rate verification failure diagnosis apparatus comprises a failure diagnosis device having a mode to diagnose a failure in the pressure measurement device at a time of the flow rate verification unit detecting the flow rate abnormality, thereby the reliability of flow rate verification can be enhanced.

Flow rate verification failure diagnosis apparatus, flow rate verification failure diagnosis system, flow rate verification failure diagnosis method, and control program product for flow rate verification failure diagnosis

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Inuyama, Japan

Akihito Sugino