Omron Corporation

Akihisa Matsuyama

Shingo Hayashi

Hiroshi Sekii

A position measurement method is used by a device including an imaging unit and a position detector that detects a position of the imaging unit to measure, using a detection value at imaging of a measurement point, position coordinates of the measurement point. The method for correcting the detection value from the position detector includes obtaining, with the device, position coordinates of predetermined indices () arranged two-dimensionally on a calibration plate () as an actual measurement value, obtaining, as a correction value, a difference between the actual measurement value and a true value resulting from transformation of position coordinates of the indices () with respect to a reference point on the calibration plate (), and correcting the detection value from the position detector (). The imaging unit () images measurement points (P) on the measurement target () to measure position coordinates of the measurement points (P).

Position measurement method using a calibration plate to correct a detection value from the position detector

An ultraviolet detector has a wavelength conversion element of a length in an incident direction of UV light set longer than the direction orthogonal to the incident angle, and a light receiving element arranged at a side plane of wavelength conversion element Unconverted ultraviolet does not exit wavelength conversion element and is propagated downwards to be attenuated. Visible light having the wavelength converted in wavelength conversion element is propagated in all directions and received at light receiving element Light receiving element detects the quantity of light according to the incident amount of ultraviolet. As a result, the detection sensitivity is ensured and degradation of the light receiving element caused by ultraviolet radiation does not occur.

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Kyoto, Japan

Akihisa Matsuyama