Other

Akihiro Tanba

Yutaka Kobayashi

Kazumasa Yanagisawa

Ryoichi Hori

Goro Kitsukawa

Hiroyuki Miyazawa

Kyoichiro Asayama

Seigoh Yukutake

A small and reliable semiconductor device is provided in a substrate which has an isolation trench and a capacitor trench. The isolation trench isolates a bipolar transistor from other semiconductor devices, and the capacitor trench provides capacitance to a memory cell which is formed in the substrate. The interior of the device isolation trench is kept in a floating state with respect to the surrounding semiconductor regions by forming an insulating film over the inner surface of the trench. In the capacitor trench, insulating layers and resilient conductive layers are formed alternately to form capacitance between the opposing conductive layers.

Semiconductor device including an improved trench arrangement

Growing community of inventors

Ibaraki-ken, Japan

Akihiro Tanba