Oki Electric Industry Co., Ltd.

Starting Industry Company Limited

Akihiro Sonoda

Tadashi Nishio

Mitsuo Osakabe

Keizo Shimizu

An ion generator generates ions above a semiconductor wafer and the ions are directed towards a surface of a semiconductor wafer. The ions combine with static charges on the semiconductor wafer to thereby discharge the surface of the semiconductor wafer.

Apparatus having a static eliminator for manufacturing semiconductor devices and a method for eliminating a static electricity on a semiconductor wafer

In order to provide a mask and a method for manufacturing a semiconductor device that achieve consistency in the resist pattern dimensions, a main pattern provided for the purpose of semiconductor element production and an additional pattern provided for the purpose of exposure quantity adjustment are drawn at a reticle At the reticle the additional pattern achieves a regularity almost identical to that of the main pattern At the same time, the additional pattern has a specific shift relative to the main pattern By achieving an optimal degree of shift between the additional pattern and main pattern at the reticle consistency in the resist pattern dimensions can be achieved without adversely affecting the process of element pattern formation.

Mask and method of manufacturing semiconductor device

Method for eliminating a static electricity on a semiconductor wafer

A rotary cutter head for use with a rotating filament trimmer in which a reel for winding cords or filaments is held between a housing covering a lower portion thereof and a retainer or hub fixed on the driven rotating shaft of the trimmer unit and is rotatably disposed within the housing. Within the bore of the reel, an axially movable slider is normally biased toward the retainer by the elastic force of a spring so that meshing engagement occurs between a peripheral array of axially projecting tongues formed on one end of the slider and a plurality of radial teeth-like ribs formed on the inner side of the retainer and establishes a driving connection to rotate the reels. By applying an axial impact against the housing, the slider is moved axially by inertial forces against the biasing force of the spring to release that engagement, and axially projecting detent fingers formed around the other end of the slider press against the opposed slopes of a circular rib formed on the inner side of the housing and bring about both positive relative rotation of the reel and fix a limit to such rotation to a predetermined amount thereby to play out a limited length of fresh cords. In order that the reel may rotate in an opposite direction to rewind the cords, moreover, the radial ribs formed on the retainer and the tongues of the slider are formed with opposed cooperating cam slopes which force the slider axially until the tongues are clear of the ribs during backward rotation.

Growing community of inventors

Tokyo, Japan

Akihiro Sonoda