Seiko Epson Corporation

Akihiro Murata

Hiroaki Hosomi

Ryosuke Nakamura

Yasushi Mizoguchi

Shojiro Kitamura

Kazushige Umetsu

Kazunori Sakurai

Shinichi Kamisuki

Mitsuhiro Yoda

Takeshi Shimizu

Makiko Nakamura

Toshiki Saito

Takuya Nakajima

Shuich Wakabayashi

A method for manufacturing a vibration device includes preparing a base wafer including a plurality of fragmentation regions, placing vibration elements at a first surface of the base wafer, producing a device wafer in which a housing that accommodates each of the vibration elements is formed in each of the fragmentation regions by bonding a lid wafer to the base wafer, forming a first groove, which starts from the lid wafer and reaches a level shifted from the portion where the base wafer and the lid wafer are bonded to each other toward a second surface of the base wafer, along the boundary between adjacent fragmentation regions of the device wafer, placing a resin material in the first groove, and forming a second groove, which passes through the device wafer, along the boundary to fragment the device wafer.

Method for manufacturing vibration device

An image display device that is used by being mounted on the head of an observer, includes: an image forming unit that forms a virtual image as an image that is visually recognizable to the observer; a detection unit that detects movement of the head of the observer; and a control unit that controls the image forming unit on the basis of the movement detected by the detection unit, wherein when the movement that is detected by the detection unit is larger than a predetermined amount, the control unit changes a display position of the virtual image.

Image display device and display control method for image display device

An optical scanning projector includes: a raster scanning unit that draws an image in a drawing area on a display surface by scanning beams in a first direction on the display surface while scanning beams in a second direction on the display surface that is orthogonal to the first direction; and a vector scanning unit that draws an image by irradiating beams so as to sequentially form segments each connecting two different points positioned on the display surface.

Optical scanning projector with raster scanning unit and vector scanning unit

An image forming apparatus includes: a first projector that scans light on a first display section to thereby display an image; a second projector that scans the light on a second display section, which is set in a position different from a position of the first display section, to thereby display an image; and a switching section that switches plural states including a first state in which the first projector displays the image on the first display section and a second state in which the second projector displays an image on the second display section.

Image forming apparatus

An actuator, includes: a weight part; a supporting part supporting the weight part; a connecting part coupling the weight part rotatable to the supporting part and having an elastic part; a driving member for driving and rotating the weight part; and a semiconductor circuit for driving the weight part. The driving member is operated to torsionally deform the elastic part and rotate the weight part. The elastic part has a first silicon part that is mainly made of silicon and a first resin part that is mainly made of resin and coupled to the first silicon part. The supporting part has at least a second silicon part made mainly of silicon and coupled to the first silicon part of the elastic part. The semiconductor circuit is provided on the second silicon part of the supporting part.

Actuator, optical scanner and image-forming device

An optical tunable filter is provided including a first substrate having light transmission properties and having a movable part and a supporting member that movably supports the movable part and having a smaller thickness than the movable part, a second substrate having light transmission properties and opposed to the first substrate, a first gap and a second gap provided between the movable part and the second substrate, an interference part causing interference between the movable part and the second substrate through the second gap and a drive member changing an interval of the second gap by moving the movable part to the second substrate by making use of the first gap.

Optical tunable filter and method of manufacturing the same

A tunable filter including; a fixed substrate provided with a fixed reflecting film and capable of transmitting light having a shorter wavelength than infrared light; a movable substrate provided with a movable section equipped with a movable reflecting film and disposed to the fixed substrate so that the movable reflecting film and the fixed reflecting film faces each other with a predetermined length of gap; and a drive section for varying the length of the gap by displacing the movable section with respect to the fixed substrate, wherein light entering the gap from the outside is repeatedly reflected by the movable reflecting film and the fixed reflecting film for outputting light having a wavelength corresponding to the length of the gap, and the movable section is provided, at an area to which the movable reflecting film is disposed, with a light transmitting section capable of transmitting light having a shorter wavelength than infrared light and for inputting/outputting light from/to the outside.

Tunable filter and method of manufacturing the same, and sensing device

An analyzer includes an optical tunable filterfor selectively outputting light having a predetermined wavelength, and a PDfor receiving light outputted from the optical tunable filterand then passed through or reflected by an object to be measured. The optical tunable filterincludes a first substrateincluding a movable portionhaving a light transmitting property; a second substratehaving a light transmitting property, the second substrate being provided so as to be opposed to the first substrate; a first gapand a second gapwhich are respectively provided between the movable portionof the first substrateand the second substrate; an interference portion which cases interference with light that enters the optical tunable filterand that has the predetermined wavelength between the movable portion and the second substrateby means of the second gap; and a driving portion for changing a distance of the second gapby displacing the movable portionwith respect to the second substrateusing the first gap

Analyzer

Provided is an optical modulator capable of forming an optical gap easily and accurately without having to perform underetching to the sacrifice layer. An optical modulator includes a first substrate provided with a first concave portion in which the bottom part becomes a moving part, and a movable reflection film being formed on the moving part; and a second substrate provided with a second concave portion having a diameter that is smaller than the diameter of the first concave portion at a position facing the first concave portion, and a fixed reflection film being formed on the bottom part of the second concave portion; wherein the depth of the first concave portion prescribes the movable range of the movable reflection film, and an optical gap is prescribed based on the spacing between movable reflection film and the fixed reflection film.

Optical modulator and manufacturing method of optical modulator

An optical tunable filter includes a first substratehaving a light transmitting property which includes a movable portion, a second substratehaving a light transmitting property which is provided so as to be opposed to the first substrate, a first gapand a second gapwhich are respectively provided between the movable portionand the second substrate, an interference portion which causes interference of incident light between the movable portionand the second substratethrough the second gap, and a driving portion which changes a distance of the second gapby displacing the movable portionwith respect to the second substrateusing the first gap. This makes it possible to provide an optical tunable filter having a simpler structure and a smaller size, which can be manufactured through a simplified manufacturing process without using a release hole and can achieve stable driving of a movable portion, and a method for manufacturing such an optical tunable filter.

Optical tunable filter and method for manufacturing the optical tunable filter

The invention provides an optical device having an optical element, a substrate, and a flexible member. A first portion of the flexible member is disposed so as to be spaced from the substrate, a second portion surrounding the first portion is adhered to the substrate, and a closed space is defined between the first portion and the substrate. The optical element is mounted on the substrate within the closed space.

Method of manufacturing an optical device

A three-dimensional mounted assembly includes a molded body, a plurality of electronic parts sealed with the molded body, a plurality of interconnections electrically connected to the electronic parts and sealed with the molded body wherein part of at least one of the interconnections is exposed on a first side of the molded body and at least another one of the interconnections is exposed on a second side of the molded body differing from the first side.

Three-dimensional mounted assembly and optical transmission device

A method for manufacturing a semiconductor device includes the steps of forming a stress relief layer on a wafer such that the stress relief layer is away from at least part of electrodes formed on the wafer; forming a wiring layer in which lines that extend from the electrodes to the stress relief layer are formed; forming outer electrodes that are over the stress relief layer and are connected to the lines in the wiring layer; and forming a dielectric layer by applying dielectric liquid by an inkjet method to portions in the lines where the outer electrodes are connected to form a capacitor. The step of forming the dielectric layer is conducted after the step of forming the wiring layer.

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Suwa, Japan

Akihiro Murata