Hitachi-High-Technologies Corporation

Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Electric Corporation

Hitachi High-Tech Corporation

Akihiro Miura

Fumihiro Sasajima

Muneyuki Fukuda

Yoshinori Momonoi

Hiroaki Mito

Takato Hirano

Nori Matsuda

Eishi Gofuku

Yoshihiro Kimura

Akio Gotoh

Kazuhiro Kusunoki

Keitarou Yamagishi

Eiji Mukai

A charged particle beam device is provided that performs proper beam adjustment while suppressing a decrease in MAM time, with a simple configuration without adding a lens, a sensor, or the like. The charged particle beam device includes: an optical element which adjusts a charged particle beam emitted from a charged particle source; an adjustment element which adjusts an incidence condition of the charged particle beam with respect to the optical element; and a control device which controls the adjustment element, wherein the control device determines a difference between a first feature amount indicating a state of the optical element based on the condition setting of the optical element, and a second feature amount indicating a state where the optical element reaches based on the condition setting and executes adjustment by the adjustment element when the difference is greater than or equal to a predetermined value.

Charged particle beam apparatus

A data generation devicetransmits communication data bound for a data receiving devicefrom a transmission unit, and a monitoring devicereceives the communication data. The monitoring devicerequests retransmission of the communication data to the data generation device, and the data generation deviceretransmits the communication data from a retransmission unit being different from the transmission unit. The monitoring devicereceives retransmission data retransmitted from the retransmission unit, compares the communication data with the retransmission data. If the communication data and the retransmission data are identical, the monitoring devicetransmits the communication data to the data receiving device. If the communication data and the retransmission data are not identical, the monitoring devicetransmits a message which notifies that the communication data and the retransmission data are not identical to the data generation device

Retransmission data processing device, retransmission data communication device, retransmission data communication system, retransmission data processing method, retransmission data communication method, and non-transitory computer readable medium for detecting abnormality by comparing retransmission data to transmission data

The invention has an object to provide a charged particle beam device in which it is possible to perform proper beam adjustment while suppressing a decrease in MAM time, with a simple configuration without adding a lens, a sensor, or the like. In order to achieve the above object, according to the invention, there is provided a charged particle beam device including: an optical element which adjusts a charged particle beam emitted from a charged particle source; an adjustment element which adjusts an incidence condition of the charged particle beam with respect to the optical element; and a control device which controls the adjustment element, wherein the control device determines a difference between a first feature amount indicating a state of the optical element based on the condition setting of the optical element, and a second feature amount indicating a state where the optical element reaches based on the condition setting and executes adjustment by the adjustment element when the difference is greater than or equal to a predetermined value.

A charged particle radiation apparatus includes a control device that switches between a first charged particle beam and a second charged particle beam, the first charged particle beam being scanned to acquire an image and a waveform signal, the second charged particle beam being scanned over a sample before the scan of the first charged particle beam and used to charge the sample more than the first charged particle beam; wherein the control device is configured to acquire at least one of signal waveform data and image data about a pattern formed on the sample in accordance with a scan performed on the sample by the second charged particle beam, and to stop, when the acquired data has proved to be indicative of a predetermined state, the scan of the second charged particle beam.

Charged particle radiation apparatus

The signal connecting through vias are provided on an edge side of a multilayer printed circuit board along a longitudinal direction thereof, and the signal wiring of the respective layers of the signal wiring layer is inclined with respected to the arrangement of the through vias.

Printed circuit board, printed circuit board used for flat panel display

Growing community of inventors

Tokyo, Japan

Akihiro Miura