Sony Precision Technology Inc.

Sony Corporation

Mori Seiki Co., Ltd.

Dmg Mori Seiki Co., Ltd.

Shin-etsu Chemical Co., Ltd.

Kanebo Cosmetics Inc.

Sony Manufacturing Systems Corporation

Dmg Mori Seike Co., Ltd

Kao Corporation

Akihiro Kuroda

Hideaki Tamiya

Kayoko Taniguchi

Hidehiro Kume

Koji Sakuta

Akihito Nakayama

Hideki Tsuchiya

Masahito Kon

Yasuhiko Onodera

Hitoshi Usui

Koji Silicone-Electronic Mat Resear Ctr Sakuta

Yuichiro Egawa

Junko Niikuni

A displacement detecting device includes an irradiation optical system, an interference optical system, a light-receiving section, and a displacement detecting section. The irradiation optical system causes two light-beams to be incident on a diffraction grating respectively at different angles with respect to a plane perpendicular to the X-direction along which grating structures of the diffraction grating are periodically arranged. The interference optical system causes two Mth-order diffracted lights of respective light-beams incident on the diffraction grating to interfere with each other, so as to generate an interference light. The light-receiving section receives the interference light and detects an interference signal. The displacement detecting section detects a vertical displacement of a surface having the diffraction grating arranged thereon based on the change of the interference signal.

Displacement detecting device

A displacement detecting device includes: a diffraction grating having a relief shape; an irradiation optical system adapted to irradiate two beams onto the diffraction grating as p-polarized light; a reflection optical system adapted to reflect two first diffracted lights generated when the two beams is diffracted by the diffraction grating, and cause the first diffracted lights to be incident again on the diffraction grating as p-polarized light so as to generate two second diffracted lights; an interference optical system adapted to cause the two second diffracted lights to interfere with each other to obtain interference light; a light receiving section adapted to receive the interference light; and a position information detecting section adapted to detect position information of the diffraction grating based on an interference signal. The period of the relief of the diffraction grating is no more than 1.5 times the wavelength of coherent light.

Displacement detecting device with a polarization change to a twice-diffracted beam

An optical displacement measurement device in which variations in interference light by stray light are suppressed to improve interpolation accuracy and detection accuracy. The surface of diffraction gratingis coated with protective layerof thickness L and refractive index n. The protective layer has thickness L such that, with angle &#x3b8; between a line normal to the protective layer and an incident light beam and an angle &#x3b8;' between diffracted light generated by diffraction grating and reflected by boundary surface of protective layer to become stray light to be re-incident on diffraction grating and a line normal to diffraction grating, interference light is of an intensity of interference such that an optical path difference between stray light and light interfering with stray light represented by&#x394;(/cos &#x3b8;&#x2032;+tan &#x3b8;&#x2032;&#xb7;sin &#x3b8;)will amount to not higher than% of intensity of interference of interference light with optical path length difference &#x394;

Optical displacement measurement device with optimization of the protective film

A position detection device in which 2nd-order or higher order diffracted light as well as stray light is suppressed from being generated to improve the S/N ratio of a position detection signal as well as to improve detection accuracy. With a pitch d of a diffraction grating, whose grating surfaceis covered with a protective layerof a refractive index n, and with a wavelength &#x3bb;in vacuum of coherent light illuminated, d&#x3c;2&#x3bb;/n is set. An angle of incidence &#x3b8;of the coherent light on the diffraction gratingis set to satisfy the following relationship: |sin &#x3b8;|&#x3c;(2&#x3bb;/dn)&#x2212;1. The 1st order diffracted light is used for position detection.

Position detection device

An optical displacement measuring device includes a diffraction grating, a reflecting optical system configured to irradiate two one-time diffracted beams diffracted at the diffraction grating on the diffraction grating again, and the reflecting optical system includes a first imaging element, a second imaging element, a first reflector, and a second reflector, wherein the focal length of the first imaging element and the focal length of the second imaging element are the same, the diffraction grating and first reflector are disposed around the focal position of the first imaging element, and the diffraction grating and second reflector are disposed around the focal position of the second imaging element, thereby suppressing influence of displacement of the diffraction grating as to other than a direction where a movement position is detected.

Optical displacement measuring device

Disclosed is a displacement measuring apparatus that includes a composite scale having a magnetic pattern and a diffraction grating each aligned in a direction of measuring axis, and a detector head moving in a direction of measuring axis relative to the composite scale. The detector head has a magnetic detection unit detecting a magnetic field exerted by the magnetic pattern to generate first reproduced signals, a light source irradiating the diffraction grating with light, and an optical detection unit detecting the light diffracted by the diffraction grating to generate second reproduced signals. In composite scale, the magnetic pattern and the diffraction grating are arranged such that a pitch of the first reproduced signals is larger than that of the second reproduced signals.

Displacement measuring apparatus

A fixed-point detector is provided. The fixed-point detector includes a plurality of fixed-point detecting patterns, a fixed-point detecting light source, and a plurality of photoelectric conversion elements. The plurality of fixed-point detecting patterns each have a pair of diffraction gratings for diffracting incident light in different directions. The fixed-point detecting light source irradiates the pair of diffraction gratings with light while moving in the measurement-axis direction with respect to the plurality of fixed-point detecting patterns. The plurality of photoelectric conversion elements move together with the fixed-point detecting light source, while receiving light beams diffracted by the respective diffraction gratings of the plurality of fixed-point detecting patterns and converting the diffracted light beams into electric signals.

Fixed-point detector and displacement-measuring apparatus

The present invention is a cosmetic, characterized in that it contains an organopolysiloxane having the following general formula:{(CH)SiO}SiCH&#x2003;&#x2003;(1) The cosmetic demonstrates excellent volatility and feel when used, and excellent storage stability.

Cosmetic

A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.

Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device

An information writing device in which the information can be written accurately efficiently and in which variable formats of the disc-shaped recording mediums can be coped with without the necessity of providing master discs from one format of the disc-shaped recording medium to another. A grating interferometer clock scale system is formed by a clock pattern dischaving a clock trackcarrying an optically readable clock patternand an optical headfor optically reading out the clock pattern. Clock signals are generated in a clock generator, to which is transmitted, via an optical fiber, the interference light obtained as an optical output obtained in turn by optically reading out the clock patternby the optical head, based on electrical signals obtained on photoelectrically transducing the optical output. The servo information synchronized with the clock signals is generated by a servo information generating part

Information writing device

A displacement pickup is provided which includes a displaceable scale () having defined therein a first area () where positional information is recorded with a predetermined pitch and a second area () where positional information is recorded with a predetermined pitch different from that in the first area (), a first reading system () to read the positional information recorded in the first area (), a first phase detector () to detect a first phase on the basis of the positional information read by the first reading system (), a second reading system () to read the positional information recorded in the second area (), a second phase detector () to detect a second phase on the basis of the positional information read by the second reading system (), a phase comparator () to make a comparison between the first and second phases, and an origin signal generator () to generate an origin signal according to the result of comparison from the phase comparator ().

Displacement pickup

The present invention provides a light emitting/receiving composite unit () for emitting and receiving lights, which includes a light source (), an optical splitting unit () for splitting returning lights to the composite unit () into a plurality of lights, a polarizing unit () for increasing and decreasing quantity of lights transmitted therefrom corresponding to polarization state of the returning lights, and an optical receiving unit () which has a plurality of photo-detecting elements (to) for detecting the lights transmitted through the polarizing unit (), which are unitedly integrated into one unit. Also, the present invention provides a displacement detection apparatus of grating interference type, which includes thus unitedly integrated composite unit (), and an external optical system of an objective unit having a reflection type diffraction grating RG, a reflecting unit (R, R) for reflecting lights from the composite unit () to the reflection type diffraction grating RG, a polarizing unit (WP, WP) for changing polarization state of diffracted lights from the reflection type diffraction grating RG, and a reflecting unit (R, R) for reflecting lights transmitted through the polarizing unit (WP, WP) to cause the reflected lights go backward.

Light-emitting/receiving combined unit and displacement sensors using the same

An optical displacement measurement system can detect a position of an object with an enhanced degree of resolution by providing, a coherent beam La is focussed on the lattice plane of a diffraction grating 1 by a first focussing element 4 and, at the same time, a first pair of diffracted beam Lb1, Lb2 are collimated and made to irradiate a reflection optical system 3 perpendicularly by a second focussing element 5. Thus, if the optical axis of the first diffracted beam Lb1 is displaced, the first diffracted beam Lb1 follows the same optical path and focussed on the lattice plane of the diffraction grating at the same spot when reflected by the reflection optical system so that the optical axis of the second diffracted beam Lb2 produced from the first diffracted beam Lb1 as the latter is diffracted will never be displaced. Therefore, the second diffracted beam that is free from any displacement of the optical axis is made to interfere with another second diffracted beam to detect the phase difference thereof and determine the displaced position of the diffraction grating 1.

Growing community of inventors

Kanagawa, Japan

Akihiro Kuroda