Canon Kabushiki Kaisha

Akihiro Hatada

Yoshiyuki Kuramoto

Tsuyoshi Kitamura

A measurement apparatus includes an optical combining unit configured to optically combine light from a first light source and light from a second light source, a forming unit configured to form pattern light using light from the first light source, a projection optical system configured to project the optically combined light onto an object, an imaging unit configured to image the object on which the pattern light is projected to capture a first image and to image the object illuminated with light from the second light source via the projection optical system to capture a second image, and a processing unit configured to correct the first image using the second image and to obtain information on a shape of the object based on the corrected first image.

Measurement apparatus for measuring shape of object, system and method for producing article

A measuring apparatus includes an optical system including a wavelength dividing element that divides light from an object simultaneously illuminated by first and second illumination units into a light component of a first wavelength and a light component of a second wavelength. A first imaging element receives a pattern light of the first wavelength reflected by the object, which is light transmitted through the wavelength dividing element but never reflected by the wavelength dividing element, thereby obtaining a first image representing a three-dimensional shape of the object. A second imaging element receives the light of the second wavelength reflected by the object, which is light reflected by the wavelength dividing element, thereby obtaining a second image representing an edge of the object.

Measuring apparatus

A measuring apparatus for measuring a position or a shape of a surface to be inspected includes a multi-wavelength interferometer and a control unit. The multi-wavelength interferometer includes an optical system that causes light to be inspected, which enters the surface to be inspected and is reflected by the surface to be inspected, and reference light to interfere with each other, a spectroscopic unit that divides interference light between the light to be inspected and the reference light into each wavelength, and a detector that detects the interference light and is provided for each divided interference light and an optical member that can adjust a position of a light guide portion that guides light from the spectroscopic unit to the detector. The control unit controls the optical member by using information related to inclination of the surface to be inspected to adjust the position of the light guide portion.

Measuring apparatus including multi-wavelength interferometer

The present invention provides a measuring apparatus which measures a shape of an object to be measured, comprising an emitting unit configured to emit pattern light, an optical system configured to irradiate the object with the pattern light emitted from the emitting unit, a deflection unit configured to deflect light emitted from the optical system, an image sensing unit configured to sense an image of the object irradiated with the pattern light, and a processing unit configured to determine the shape of the object based on the image of the object sensed by the image sensing unit, wherein the deflection unit includes a deflection element, wherein the measuring apparatus irradiates the object with light deflected by the deflection element, and a direction deflected by the deflection element differs depending on a polarization state of incident light in the deflection element.

Growing community of inventors

Utsunomiya, Japan

Akihiro Hatada