Edwards Japan Limited

Boc Edwards Japan Limited

Akihiko Wada

Yoshiyuki Sakaguchi

Takashi Kabasawa

Manabu Nonaka

Tooru Miwata

Akihiro Ito

The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.

Thread groove pump mechanism, vacuum pump including thread groove pump mechanism, and rotor, outer circumference side stator, and inner circumference side stator used in thread groove pump mechanism

Provided is an exhaust pump that comprises connecting opening portions that can be deburred easily and that are suitable for enhancing gas evacuation performance. A rotor (a cylindrical rotating member) of an exhaust pump comprises a plate body that has a ring-like projection on a reverse side outer peripheral section of the rotor, and a cylindrical body that is fitted into an outer periphery of the ring-like projection. Connecting opening portions of the exhaust pump comprise holes that are formed by notching an outer peripheral section of the plate body and an outer peripheral section of the ring-like projection, and a portion (specifically, a hole) of the holes that opens in the form of a horizontal hole is covered by an outer-peripheral upper end portion of the cylindrical body.

Exhaust pump

An object of the present invention is to enhance the capacity of a turbomolecular pump. A turbomolecular pump is a composite-type vacuum pump that combines a blade portion and a thread groove portion. Openings are formed at a joint portion between a rotor blade holding portion that holds rotor blades and a stepped portion that holds a rotor cylinder portion, such that the openings span both the rotor blade holding portion and the stepped portion. Part of the gas that is evacuated by the blade portions is evacuated by a thread groove portion that is formed of the rotor cylinder portion and a stator thread groove, and the rest of the gas is led into the rotor cylinder portion via the openings, and is evacuated by a thread groove portion that is formed of the rotor cylinder portion and another stator thread groove. Stress derived from rotation of a rotor can be withstood when the openings are formed at the joint portion between the rotor blade holding portion and the stepped portion. Moreover, a groove in which a balancer weight is disposed is provided at a clearance portion that lies further on the inlet port side of the other stator thread groove, thereby eliminating the necessity of shortening the length of the other stator thread groove.

Turbo-molecular pump

A vacuum pump is provided in which gas molecules in a vacuum chamber are sucked and exhausted by the rotational motion of a rotor rotatably supported in a pump case. At least one nickel alloy layer is disposed on a surface of at least one component defining a flow path in the vacuum pump for increasing a resistance of the component to corrosion due to a corrosive effect of a gas flowing through the flowpath. A nickel oxide is formed on a surface of the nickel alloy layer and has a higher emissivity than that of the nickel alloy layer for increasing a quantity of heat radiated from the surface of the component when the component is heated during operation of the vacuum pump.

Growing community of inventors

Yachiyo, Japan

Akihiko Wada