Other

Akihiko Saitou

Keiji Hanzawa

Satoshi Shimada

Atsushi Miyazaki

Junichi Horie

Norio Ichikawa

Yasuo Onose

A high-accuracy high-stability capacitor type pressure sensor which eliminates a parasitic capacitance between a reference capacitor and a semiconductor substrate. A capacitor type pressure sensor comprising, on a semiconductor substrate , an active capacitor whose capacitance varies as the surrounding pressure varies, a reference capacitor whose capacitance will not vary substantially as the surrounding pressure varies, and a circuit which is electrically connected to both said active and reference capacitors and detects the difference or ratio thereof, and uses the potential of a semiconductor substrate, wherein an electrode of said reference capacitor is formed on the semiconductor substrate with a dielectric therebetween.

Growing community of inventors

Kawasaki, Japan

Akihiko Saitou