Fujifilm Corporation

Fujifilm Business Innovation Corp.

Akihiko Ohtsu

Shogo Yamazoe

Shinya Hakuta

Yoshihiro Sugawara

Kazuhiro Oki

Akiko Hattori

Masayuki Naya

Tadashi Kasamatsu

Ryo Saito

Hideki Yasuda

Tatsuya Yoshihiro

Masahiro Yoshidome

Yukihisa Kawada

Fuyuki Kokubu

Katsuhiro Nishimaki

Koichi Kumeta

Shinya Mitourida

Koh Umenai

Yamazoe Shogo

Provided are a method for inspecting a chemical solution, the method being able to analyze minute foreign matter in the chemical solution, a method for producing a chemical solution, a method for controlling a chemical solution, a method for producing a semiconductor device, a method for inspecting a resist composition, the method being able to analyze minute foreign matter in the resist composition, a method for producing a resist composition, a method for controlling a resist composition, and a method for checking a contamination status of a semiconductor manufacturing apparatus, the method being able to control minute foreign matter in the semiconductor manufacturing apparatus. The method for inspecting a chemical solution includes a step 1X of preparing a chemical solution; a step 2X of applying the chemical solution onto a semiconductor substrate; and a step 3X of measuring whether there is a defect on a surface of the semiconductor substrate to obtain positional information of the defect on the surface of the semiconductor substrate, irradiating, based on the positional information, the defect on the surface of the semiconductor substrate with a laser beam, collecting an analytical sample obtained by the irradiation by using a carrier gas, and subjecting the analytical sample to inductively coupled plasma mass spectrometry.

Method for inspecting chemical solution, method for producing chemical solution, method for controlling chemical solution, method for producing semiconductor device, method for inspecting resist composition, method for producing resist composition, method for controlling resist composition, and method for checking contamination status of semiconductor manufacturing apparatus

A silencing device and an air supply system according to an embodiment of the present invention include a resonance silencer provided at a position connected to a space in which the sound source is located within the air supply system in order to silence the noise generated from the sound source in the housing, in which in a case where a resonance wavelength of the resonance silencer alone is denoted by λ, a distance by which the resonance silencer is separated from the sound source is less than λ/2. A fundamental resonance frequency of the resonance silencer is equal to or less than an acoustic upper limit frequency determined according to a size of the housing.

Silencing device and air supply system

In a soundproof structure body including a tubular tube body having an opening portion, and a resonance type soundproof structure, in which a phase difference θ, at an upstream of the resonance type soundproof structure, between a reflected wave in the resonance type soundproof structure and a reflected wave of a transmitted wave transmitted through the resonance type soundproof structure and reflected by the opening portion satisfies Inequation |θ−π|≤π/3 with respect to a resonance frequency of the resonance type soundproof structure. This soundproof structure body can effectively offset a reflected wave from a resonance type soundproof structure body by opening end reflection by appropriately specifying positions of the resonance type soundproof structure and the opening end portion of a duct, a tube line, or the like to improve an absorbance of a single resonance type soundproof structure.

Soundproof structure body

An axial fan that includes a casing having an inner space that penetrates in one direction, and a rotor blade disposed in the inner space of the casing, and a silencer that is disposed at a position connected to the inner space of the axial fan are provided, in which the axial fan has a sound pressure distribution having a position at which a sound pressure is high and a position at which the sound pressure is low in a circumferential direction in the inner space during driving, and the silencer is disposed at the position of the axial fan in the circumferential direction at which the sound pressure is high and is not disposed at the position at which the sound pressure is low.

Blower with silencer

A blower with a silencer has the blower including an axial fan including a casing, a motor attached to the casing, and a rotor having a shaft portion attached to the motor and rotated and a blade formed to protrude to an outer side of the shaft portion in a radial direction, and a silencer attached to the casing, in which the silencer includes a resonator that selectively silences a dominant sound generated by the axial fan, the silencer is disposed at a position in which at least a part of the silencer overlaps with the shaft portion, as viewed from a rotation axis direction of the rotor, and in a case in which, in a cross section perpendicular to a rotation axis of the rotor, a circle around the rotation axis, which has a radius of a line connecting the rotation axis and a point of a most distal end of the blade, is defined as a rotation region, an area of the silencer in the cross section perpendicular to the rotation axis is smaller than an area of the rotation region.

An acoustic system includes a duct that has a function of causing a fluid to flow therein and has a tubular shape, an internal sound source that is disposed inside the duct on an upstream side or at an outer peripheral portion of the duct, which communicates with an inside of the duct on the upstream side, or an external sound source that is on an outside from an end portion of the duct, and a membrane-shaped member that is formed as a part of a wall of the duct and vibrates in response to sound. A structure including the membrane-shaped member and a rear surface closed space thereof causes acoustic resonance to occur, transmits the acoustic resonance from the sound source into the duct, and suppresses sound radiated from the other end portion of the duct on a downstream side. The external sound source is at a distance within a wavelength at a frequency of the acoustic resonance on the outside from the end portion of the duct. In the acoustic system, as a small membrane-type resonance structure is disposed in a flow passage horizontal direction, wind does not directly hit a membrane surface perpendicularly, and since the acoustic system does not have a through hole or a hole, wind noise can be eliminated.

Acoustic system

An object is to provide a silencing system that can achieve both high ventilation performance and high soundproof performance, can silence a plurality of pieces of resonant sound, and has high general-purpose properties since the silencing system does not need to be designed according to a tubular member. The silencing system includes one or more silencers that are disposed in a tubular member provided to penetrate a wall separating two spaces, and satisfies '0&#x3c;Re[Bn]&#x3c;1' and 'Im[Bn]&#x3e;0' in a case where a standardized effective modulus of elasticity in an interior space of the tubular member in which the silencers are disposed is denoted by Bn.

Silencing system

An object is to provide a silencing system that includes a silencer disposed in a ventilation sleeve, can suppress the generation of negative pressure in the interior, and can prevent a door or the like of an interior entrance from being difficult to open. The silencing system includes one or more silencers that are disposed in a ventilation sleeve provided to penetrate a wall separating two spaces, and '&#x3b1;A&#x3e;10' is satisfied in a case where a gap equivalent area of the ventilation sleeve in which the silencer is installed is denoted by &#x3b1;A and a normalized sound transmission loss in an octave band in which a first resonant frequency of the ventilation sleeve is present is denoted by TL. C denotes a constant determined by a measurement system in a case where there is no silencer and P denotes a transmission efficiency coefficient.

A fan, and a silencer that silences a sound generated by the fan are provided, in which the silencer has a resonance characteristic, the silencer is disposed at a position connected to a sound field space of the sound generated by the fan, and a sum of an absorbance and a reflectivity of the silencer at a resonance frequency is 10% to 43% and a standardized half-width of the silencer is more than 0.05 and 0.25 or less.

Blower with silencer and moving object with propeller

A soundproof structure body includes a first tube structure and a second tube structure connected to the first tube structure and having a cross-sectional area different from the first tube structure, in which a structure body having a cross-sectional area smaller than a cross-sectional area of the first tube structure is installed in the first tube structure, and a transmission loss in a case where the structure body is installed in the first tube structure with respect to a case where the structure body is not installed in the first tube structure is positive at two frequencies adjacent to each other and difficult to generate an air column resonance mode in the first tube structure. This soundproof structure body generates a soundproof effect even at frequencies other than air column resonance of a tube structure such as a duct or a muffler, has a small size, and can obtain a high transmission loss in a wide-band.

Provided is a soundproof structure body including an opening member that forms an opening tube line having a cross-sectional area S, and at least two resonance structures for sound waves that are installed inside the opening tube line, and in a case where a cross-sectional area of the resonance structure is defined as Si, a width thereof is defined as di, an interval between the two resonance structures is defined as L, an impedance of the two resonance structures is defined as Zi, and a synthetic acoustic impedance is defined as Zc, a condition of Expression (1) is satisfied at a resonance frequency f0 at which a theoretical absorption value At is a maximum value. This soundproof structure body can realize high absorption using a plurality of resonance structures.(0,)&#x3e;0.75&#x2003;&#x2003;(1), Here, L&#x3e;0, S&#x3e;0, Si (i=1, 2)&#x3e;0, di (i=1, 2)&#x3e;0

A soundproof system includes a tube structure having one or more opening ends and a soundproof structure having an opening portion or a radiation surface. The following Expression (1) is satisfied in a case in which a phase difference between sound incident on the soundproof structure and sound re-radiated from the soundproof structure is defined a phase difference as &#x3b8;1; for one or more maximum values of the pressure of sound formed in the tube structure, a distance between the opening portion or the radiation surface and a position where the sound pressure has a maximum value in the tube structure is L; a wavelength of the incident sound is &#x3bb;; and a phase difference &#x3b8;2 is defined as 2&#x3c0;&#xd7;2L/&#x3bb;:|&#x3b8;1&#x2212;&#x3b8;2|&#x2264;&#x3c0;/2&#x2003;&#x2003;(1). The soundproof system with a small size can obtain high transmission loss in a wide band.

Soundproof system

A first ventilation duct line has a first portion having a first sectional area, a second portion having a second sectional area larger than the first sectional area, and a third portion having an inclined inner face connecting the first portion and the second portion to each other. Further, there is a second ventilation duct line having an opening portion positioned on an inner side of the first portion of the first ventilation duct line.

Ventilation duct line assembly and apparatus

Provided is a silencing tubular structure body that has high strength and can be disposed in a narrow space. A tubular member including a tubular portion having a tubular shape, and a frame portion having at least a part formed integrally with an inner peripheral surface side of the tubular portion; and a lid member that is exchangeably disposed on an opening surface of the frame portion of the tubular member are included, in which the frame portion and the lid member form a resonant silencing structure.

Silencing tubular structure body

An object is to provide a silencing system that can achieve both high ventilation performance and high soundproof performance, can silence a plurality of pieces of resonant sound, and has high general-purpose properties since the silencing system does not need to be designed according to a tubular member. In a silencing system where silencers are disposed on a tubular member, the silencers silence sound having a frequency of first resonance of the tubular member, each silencer includes a cavity portion and an opening portion, the opening portions are connected to a sound field space of the first resonance of the tubular member, a conversion mechanism for converting sound energy into thermal energy is disposed in each cavity portion or at a position where the conversion mechanism covers the opening portion, a ratio S/Sof the area Sto the area Ssatisfies '0&#x3c;S/S&#x3c;40%' in a case where the area of the opening portion of the silencer is denoted by Sand the surface area of an inner wall of the cavity portion is denoted by S, and the depth Lof the cavity portion in the traveling direction of an acoustic wave in the silencer satisfies '0.011&#xd7;&#x3bb;&#x3c;L&#x3c;0.25&#xd7;&#x3bb;,' in a case where the wavelength of an acoustic wave at the resonant frequency of the first resonance is denoted by &#x3bb;.

Growing community of inventors

Ashigarakami-gun, Japan

Akihiko Ohtsu