Furukawa Co., Ltd.

Riken Corporation

Akihide Hamano

Hiromasa Ito

Seigo Ohno

Hiroaki Minamide

An electrical resistance measurement apparatus includes a light irradiation unit that irradiates a conductive thin film with terahertz light, a reflection light detection unit that detects reflection light from the conductive thin film, and a computer containing a storage that stores correlation between the reflectance of the terahertz light from the conductive thin film and electrical resistance of the conductive thin film. The computer further containing a processor that determines, reflectance of the terahertz light from the conductive thin film based on a result of detection performed by the reflection light detection unit, and determines the electrical resistance of the conductive thin film based on the correlation and a result of the determination of the reflectance.

Electrical resistance measurement apparatus and electrical resistance measurement method

A mobility measuring apparatus includes a storage unit that respectively stores a relationship between the mobility &#x3bc; of carriers in a semiconductor and a decay constant &#x3b3; of the carriers and a relationship between a reflectivity R of the semiconductor to a terahertz light and the decay constant &#x3b3; of the carriers, a light radiating unit that radiates a terahertz light to the semiconductor as a sample, a detecting unit that detects a reflected light of the sample to the radiated terahertz light, a reflectivity calculating unit that calculates the reflectivity Rof the sample by determining a ratio of an intensity of the reflected light relative to an intensity of the radiated terahertz light, an obtaining unit that obtains the decay constant &#x3b3;of the sample corresponding to the reflectivity Rof the sample by making reference to the stored relationship between the reflectivity R and the decay constant &#x3b3; of the carriers, and a mobility calculating unit that calculates the mobility &#x3bc;of the sample from the stored relationship between the mobility &#x3bc; and the decay constant &#x3b3; on the basis of the obtained decay constant &#x3b3;.

Mobility measuring apparatus, method therefor, and resistivity measuring apparatus and method therefor

A nondestructive carrier concentration measuring device () includes: a storage unit () that stores a correlation between the reflectance of an inorganic compound semiconductor against terahertz light and a carrier concentration; a light radiation unit () that irradiates the terahertz light () to the inorganic compound semiconductor as a sample; a detection unit () that detects reflected light () of the inorganic compound semiconductor against the irradiated terahertz light (); a reflectance calculation unit () that compares the irradiated terahertz light () with the reflected light () and calculates an actual measurement value of the reflectance of the inorganic compound semiconductor; and a read unit () that refers to the stored correlation and reads the carrier concentration of the sample corresponding to the actual measurement value of the reflectance.

Growing community of inventors

Tsukuba, Japan

Akihide Hamano