Rigaku Corporation

Akifusa Higuchi

Hideaki Takahashi

Kiyoshi Ogata

Kazuhiko Omote

Yoshiyasu Ito

Hiroshi Motono

Sei Yoshihara

Shigematsu Asano

Katsutaka Horada

Shiro Umegaki

Takao Kinefuchi

Ryotaro Yamaguchi

Naoki Matsushima

Licai Jiang

Boris Verman

Asao Nakano

Naoki Kawahara

Makoto Kambe

Muneo Yoshida

An X-ray inspection device of the present invention includes a sample placement unitfor placing a sample as an inspection target therein, a sample placement unit positioning mechanismfor moving the sample placement unit, a goniometerincluding first and second rotation membersthat rotate independently of each other, an X-ray irradiation unitinstalled on the first rotation member, and a two-dimensional X-ray detectorinstalled on the second rotation member. The sample placement unit positioning mechanismincludes a &#x3c7; rotation mechanismfor rotating the sample placement unitand a &#x3d5;-axis about a &#x3c7;-axis that is orthogonal to a &#x3b8;s-axis and a &#x3b8;d-axis at a measurement point P and extends horizontally.

X-ray inspection device

In an X-ray inspection device according to the present invention, an X-ray irradiation unitincludes a first X-ray optical elementfor focusing characteristic X-rays in a vertical direction, and a second X-ray optical elementfor focusing the characteristic X-rays in a horizontal direction. The first X-ray optical elementis constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.

X-ray inspecting device, X-ray thin film inspecting method, and method for measuring rocking curve

An X-ray thin film inspection device of the present invention includes an X-ray irradiation unitinstalled on a first rotation arm, an X-ray detectorinstalled on a second rotation arm, and a fluorescence X-ray detectorfor detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unitincludes an X-ray optical elementcomprising a confocal mirror for receiving X-rays radiated from an X-ray tube, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanismfor passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element

X-ray thin film inspection device

Growing community of inventors

Tokyo, Japan

Akifusa Higuchi