Samsung Display Co., Ltd.

Akifumi Sangu

Gyoowan Han

Gyoo Wan Han

Jekil Ryu

Hyoung-Joo Kim

Alexander Voronov

Je Kil Ryu

Cheol Ho Park

Hae Sook Lee

Young Su Chae

Kyungjae Lee

Eun Sun Choi

Emil Aslanov

Il Young Jeong

Hyoung Joo Kim

Cheolho Park

Jung Hwa You

Haesook Lee

Jin Hong Jeun

Youngsu Chae

A laser crystallization apparatus according to an embodiment includes: a light source unit which irradiates a laser beam; and a path conversion unit which converts the laser beam incident from the light source unit into a linear beam having a long axis parallel to a first direction and a short axis parallel to a second direction. The linear beam propagates in a third direction perpendicular to the first direction and the second direction, the path conversion unit includes an incident window extending parallel to a first length direction, an emission window extending parallel to a second direction, a first reflection unit disposed at the same side with the incident window, and a second reflection unit disposed at the same side with the emission window, and the second length direction extends parallel to the first direction in a view of the third direction.

Laser crystallization apparatus

A laser processing apparatus includes a laser source; a width adjuster that adjusts a width of a laser beam irradiated from the laser source; and a scanner that adjusts an irradiation direction of the laser beam having passed through the width adjuster, wherein the width adjuster includes a first width adjusting portion and a second width adjusting portion arranged on a traveling direction of the laser beam, a focal length of the first width adjusting portion is equal to or greater that about 20,000 mm and a focal length of the second width adjusting portion is equal to or greater than about 20,000 mm.

Laser processing apparatus and laser processing method

An apparatus for manufacturing a display device includes a chamber, a laser module including a plurality of laser generators which respectively generates a plurality of raw laser beams using a solid material as a medium, a beam coupling module which combines the plurality of raw laser beams into a plurality of coupling beams, a beam mixing unit which converts the plurality of coupling beams into a plurality of mixing beams, a micro smoother which induces vibration movements of the plurality of mixing beams, an optical module which converts the plurality of mixing beams passed through the micro smoother into a final laser beam, and directs the final laser beam to the chamber, and a seal box disposed between the optical module and the chamber.

Apparatus for manufacturing display device

The present disclosure relates to an apparatus for forming a line beam. The apparatus includes a laser source, a telescope unit, a beam-transforming unit, a Fourier unit, a long-axis optical unit, and a short-axis optical unit. The laser source is configured to generate input light. The telescope unit is configured to magnify the input light in an X-axis direction perpendicular to an optical axis, which is a progression direction of the input light. The beam-transforming unit is configured to divide light incident from the telescope unit into a plurality of sub-columns. The Fourier unit is configured to uniformly mix the plurality of sub-columns. The long-axis optical unit is configured to uniformly disperse light mixed by the Fourier unit in the X-axis direction. The short-axis optical unit is configured to focus light passing through the long-axis optical unit onto a reference plane, wherein the short-axis optical unit includes a concave reflective surface, and a curvature of the reflective surface is maintained constant in the X-axis direction.

Apparatus for forming line beam

A laser processing apparatus according to an exemplary embodiment includes: a light source generating a laser beam; and a light converging unit converging the laser beam to a focal point on an object to be processed, wherein the light converging unit includes a first optical element including a through hole penetrating the first optical element; a second optical element including a first region reflecting the laser beam and a second region transmitting the laser beam; and a third optical element including a focusing lens as a convex lens, a lower surface of the first optical element is a concave mirror, and an upper surface of the second optical element is convex and a lower surface thereof is concave.

Laser processing apparatus

A laser crystallizing apparatus includes a first light source unit configured to emit a first input light having a linearly polarized laser beam shape. A second light source unit is configured to emit a second input light having a linearly polarized laser beam shape. A polarization optical system is configured to rotate the first input light and/or the second input light at a predetermined rotation angle. An optical system is configured to convert the first input light and the second input light, which pass through the polarization optical system, into an output light. A target substrate is seated on a stage and output light is directed onto the target substrate. A monitoring unit is configured to receive the first input light or the second input light from the polarization optical system and measure a laser beam quality thereof.

Laser crystallizing apparatus

A laser processing apparatus includes a light source configured to generate a laser beam, and a light converging optical system configured to converge laser beam to a focal point at an object to be processed, the light converging optical system including a through-hole optical element and a composite optical element under the through-hole optical element, wherein the through-hole optical element includes a first recess portion configured as a concave mirror at a lower surface of the through-hole optical element, and wherein an upper surface of the composite optical element is convex and includes a first region configured to reflect the laser beam and a second region configured to transmit the laser beam.

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Hwaseong-si, South Korea

Akifumi Sangu