Nec Corporation

Japan E.m. Co., Ltd.

Akeo Katahira

Sakae Kitajo

Ichiro Hazeyama

Kazuhiko Futakami

Yuzo Shimada

Masaru Terashima

Jun Ishida

Masahiro Kubo

Tosiji Yamada

Shinichi Ishiduka

Susumu Nanko

Hitoshi Anma

A method of arranging microspheres with liquid, a microsphere arranging device, and a semiconductor device are provided. The method comprising the steps of placing the semiconductor device with a large number of pads with holes, on a loading table with a variable tilt angle, and pouring microspheres together with conductive liquid held in a holding container onto the semiconductor device. The microspheres are storably placed in the holes on the pads of the semiconductor device. The non-stored microspheres and conductive liquid are accumulated in a receiving tank, and the conductive liquid including the accumulated microspheres are transferred to the holding container by a pump.

Method of arranging microspheres with liquid, microsphere arranging device, and semiconductor device

Conductive balls are transferred from a pallet onto an array of conductive pads on a semiconductor chip by means of a transfer apparatus; the transfer apparatus includes a pallet formed with an array of recesses same in pattern as the array of conductive pads, a movable head formed with an array of vacuum holes and a driving mechanism for moving the head from an idle position onto the pallet and from the pallet to the semiconductor chip; when the head is moved to the pallet, the vacuum holes are connected to the recesses so as to confine the conductive balls in the narrow spaces; the vacuum is developed; then the conductive balls are traveled through the closed spaces to the vacuum holes; even if the conductive balls have been charged, the conductive balls are never attracted to the adjacent balls, and are surely captured by the vacuum holes.

Transfer apparatus for arraying small conductive bumps on a substrate and/ or chip

Transfer apparatus for arraying small conductive bumps on substrate and/ or chip

Growing community of inventors

Shizuoka, Japan

Akeo Katahira