Mitsubishi Electric Corporation

Akemi Nagae

Hiroshi Watanabe

Akihiro Koyama

Shiro Hino

Kohei Ebihara

Kensuke Taguchi

Kotaro Kawahara

Hidenori Koketsu

An object of the present invention is to provide a silicon carbide semiconductor device with which the electric field at the time of switching is relaxed and the element withstand voltage can be enhanced. The distance between the outer peripheral end of a second surface electrode and the inner peripheral end of a field insulation film is smaller than the distance between an outer peripheral end of the second surface electrode and an inner peripheral end of the field insulation film in the case where the electric field strength applied to the outer peripheral lower end of the second surface electrode is calculated so as to become equal to the smallest dielectric breakdown strength among the dielectric breakdown strength of the field insulation film and the dielectric breakdown strength of the surface protective film at the time of switching when the value of dV/dt is greater than or equal to 10 kV/&#x3bc;s.

Silicon carbide semiconductor device

Growing community of inventors

Tokyo, Japan

Akemi Nagae