Asm Technology Singapore Pte Ltd

Agency for Science, Technology and Research

Ajit S Gaunekar

Gary Peter Widdowson

Gang Ou

You Yong Liao

Hon Yu Peter Ng

Kui Yao

Trung Dung Luong

Dongsheng Zhang

Saravanan Shanmugavel

Sun Kuen Wong

The miniaturized piezoelectric accelerometer includes a support frame () having a cavity () and a seismic mass () supported by a plurality of suspension beams () extending from the support frame (). Each of the suspension beams () has a piezoelectric thin film coated on a top surface thereof, with a pair of inter-digital electrodes () deposited on an upper surface of each piezoelectric thin film. The presence of acceleration excites bending and thus strain in the piezoelectric thin film, which in turn causes electrical signals to be generated over terminals of the electrodes (). To collect constructively the output of the electrodes (), one terminal of each of the electrodes () is routed to and electrically connected at a top surface () of the seismic mass ().

Miniaturized piezoelectric accelerometers

A gantry system is provided that comprises a gantry beam having a first section and a second section and first and second motors cooperating to drive the respective first and second sections in parallel directions to position the gantry beam along a linear axis. A flexure is connected between the first and second sections about which the second section is deflectable relative to the first section, which is advantageous to reduce any stresses that may be caused in the gantry system when driving the gantry beam.

Gantry positioning system

A robotic arm assembly is provided comprising a driving mechanism including a rotor which is rotatable relative to a stator. The rotor is coaxially rotatable about a columnar shaft having a substantially hollow central longitudinal axis. A first arm having proximal and distal pivotal ends is rigidly mounted on the rotor such that the first arm is drivable to rotate by the driving mechanism. A proximal pivotal end of a second arm having proximal and distal pivotal ends is pivotally connected to the proximal pivotal end of the first arm. A first timing pulley is mounted coaxially onto the columnar shaft, and a second timing pulley which is spaced from the first pulley is drivable to rotate together with rotation of the first arm. A timing belt connects the first and second timing pulleys and is operative to rotate the second arm relative to the first arm as the first arm is driven to rotate by the driving mechanism, such that the distal pivotal ends of the first and second arms are configured to always lie along a substantially straight line.

Robotic arm driving mechanism

A linear actuator for a motion system is provided with a velocity sensor for monitoring a velocity of an actuation arm that it is driving. The linear actuator comprises a magnetic field, a first coil that is controllably movable within the magnetic field by adjusting a current flowing through the first coil whereby to drive the actuation arm and a second coil that is movable with the first coil and configured such that a voltage is inducible in the second coil that is proportional to its velocity. A controller device is connected to the second coil for receiving feedback indicating the voltage induced in the second coil whereby a velocity of the actuation arm is determinable, wherein the controller device is further connected to the first coil and is operative to adjust the current flowing in the first coil based upon said feedback for controllably driving the actuation arm.

Linear actuator comprising velocity sensor

A die ejector system and method for removing a die from an adhesive surface. The system includes an ejector tool that is operative to move relative to the die whereby to push the die. The ejector tool may consist of a collet holder and an ejector pin array. A shaft holds the ejector tool and is in turn coupled to a forcer of a linear motor. The forcer is movable relative to a stator of the linear motor flexure bearings coupled to the shaft guide movement of the ejector tool relative to the die. After the die is pushed by the ejector tool, a die pick-up device removes the die from the adhesive surface.

Die ejector system using linear motor

A bondhead assembly having a bond body for mounting a bonding tool, a support structure that is configured to be drivable for moving the bondhead assembly to different locations and flexural elements arranged substantially along at least one plane which couple the bond body to the support structure for flexibly supporting the bond body during movement with respect to the support structure. A motor is coupled to the support structure and it is operative to drive the bond body to move relative to the support structure along an axis extending substantially perpendicular to the at least one plane.

Lightweight bondhead assembly

An apparatus is disclosed for moving an optical component of an opto-mechanical inspection system relative to an object to be inspected using a linear actuator comprising a coil located in a magnetic field created by a magnet assembly. A translation stage is coupled to either of said coil and magnet assembly whereby the translation stage is configured for motion relative to the other of said coil and magnet assembly. Movement of the translation stage is configured along a plane that is substantially perpendicular to a direction of incident light projected from a light source through the optical component onto the object.

Translation mechanism for opto-mechanical inspection

The position of a working point relative to a working space, such as a working point of a carriage on a gantry beam of an XY positioning table, is determined by measuring at least two sets of displacements. A first set of displacements, of the working point relative to an intermediate component, such as the gantry beam, includes a relatively large displacement (X) in a first linear degree of freedom and relatively small displacements (Y', Y&#x2032;), in at least two of the five degrees of freedom other than the first. The second set of displacements, of the intermediate component relative to the working space, includes a relatively large displacement (Y, Y), in a second linear degree of freedom, and relatively small displacements (X&#x2032;, X&#x2032;), in at least two of the five degrees of freedom other than the second.

Determination of a movable gantry position including a dual measurement module

A clamping device is provided for clamping an object, such as bonding wire for a wire bonding machine. The device comprises a pair of clamping arms arranged in pivotal relationship with each other about a pivot point, the clamping arms having clamping ends movable between an open position and a closed position. An attraction device is operative to provide an attraction force between the clamping arms about the pivot point. The device includes biasing means that is operative to provide a biasing force in opposition to the attraction force about the pivot point, such that the biasing force is operative to bias the clamping ends towards the closed position. In a preferred embodiment, the biasing means comprises a flexure bearing.

Clamping device

The invention provides an apparatus and method for clamping an object. The apparatus comprises a clamping mechanism and an actuation system to actuate clamping and de-clamping of the clamping mechanism, wherein the actuation system comprises two actuator devices which are operatively coupled whereby to provide an actuation force to the clamping mechanism. Preferably, the actuator devices comprises a variable reluctance actuator and a linear induction actuator coupled together and adapted to cooperate to provide the actuation force to the clamping mechanism.

Clamp actuation mechanism

The invention provides a motor system and a method for positioning a load. The system comprises support means such as an XY table for supporting the load. A first motor and a second motor cooperate to drive the load, whereby the first motor is adapted to provide higher thrust than the second motor and the second motor is adapted to deliver higher positioning accuracy than the first motor during a positioning sequence to position the load.

Growing community of inventors

Singapore, Singapore

Ajit S Gaunekar