Globalfoundries U.S. Inc.

Globalfoundries Inc.

Ajay Raman

Vibhor Jain

Siva P Adusumilli

Johnatan A Kantarovsky

Sebastian Theodore Ventrone

Yves T Ngu

Jeonghyun Hwang

John J Ellis-Monaghan

Zhong-Xiang He

Mark Levy

Robert J Gauthier, Jr

Qizhi Liu

Alvin Jose Joseph

Rajendran Krishnasamy

Rahul Mishra

Ramsey M Hazbun

Brett T Cucci

Oscar Restrepo

Uppili S Raghunathan

Rainer Thoma

A structure includes a transistor, e.g., HEMT, with a field plate positioned laterally to a side of an active gate and including a first portion extending over the active gate. A dielectric layer isolates a lower surface of the first portion from an upper surface of the active gate. A field plate contact includes interconnect layers located directly over the active gate and electrically coupled to the first portion directly over the active gate. The field plate contact allows electrical operation of the field plate, but also acts as a thermally conductive path from the active gate through the interconnect layers to cool likely hot spots within the transistor.

Field plate structure to reduce self-heating in transistor and related method

The present disclosure relates to semiconductor structures and, more particularly, to a bipolar transistor with a stepped emitter and methods of manufacture. The structure includes: a collector; a base over the collector; and an emitter over the base, the emitter comprising at least one stepped feature over the base.

Bipolar transistor with stepped emitter

Disclosed are a transistor and a method for forming the transistor. The method includes concurrently forming gate and source/drain openings through an uppermost layer (i.e., a dielectric layer) in a stack of layers. The method can further include: depositing and patterning gate conductor material so that a first gate section is in the gate opening and a second gate section is above the gate opening and so that the source/drain openings are exposed; extending the depth of the source/drain openings; and depositing and patterning source/drain conductor material so that a first source/drain section is in each source/drain opening and a second source/drain section is above each source/drain opening. Alternatively, the method can include: forming a plug in the gate opening and sidewall spacers in the source/drain openings; extending the depth of source/drain openings; depositing and patterning the source/drain conductor material; and subsequently depositing and patterning the gate conductor material.

Transistor with multi-level self-aligned gate and source/drain terminals and methods

Disclosed are embodiments of a transistor (e.g., a III-V high electron mobility transistor (HEMT), a III-V metal-insulator-semiconductor HEMT (MISHEMT), or the like) that has multiple self-aligned terminals. The self-aligned terminals include a self-aligned gate, a self-aligned source terminal and, optionally, a self-aligned drain terminal. By forming self-aligned terminals during processing, the separation distances between the terminals (e.g., between the gate and source terminal and, optionally, between the gate and drain terminal) can be reduced in order to reduce device size and to improve performance (e.g., to reduce on resistance and increase switching speeds). Also disclosed herein are method embodiments for forming such a transistor.

Transistor with self-aligned gate and self-aligned source/drain terminal(s) and methods

The present disclosure relates to integrated circuits, and more particularly, to an anti-tamper x-ray blocking package for secure integrated circuits and methods of manufacture and operation. In particular, the present disclosure relates to a structure including: one or more devices on a front side of a semiconductor material; a plurality of patterned metal layers under the one or more devices, located and structured to protect the one or more devices from an active intrusion; an insulator layer between the plurality of patterned metal layers; and at least one contact providing an electrical connection through the semiconductor material to a front side of the plurality of metals.

Anti-tamper x-ray blocking package

The present disclosure relates to an active x-ray attack prevention structure for secure integrated circuits. In particular, the present disclosure relates to a structure including a functional circuit, and at least one latchup sensitive diode circuit configured to induce a latchup condition in the functional circuit, placed in proximity of the functional circuit.

Active attack prevention for secure integrated circuits using latchup sensitive diode circuit

The present disclosure relates to a metal layer for an active x-ray attack prevention device for securing integrated circuits. In particular, the present disclosure relates to a structure including a semiconductor material, one or more devices on a front side of the semiconductor material, a backside patterned metal layer under the one or more devices, located and structured to protect the one or more devices from an active intrusion, and at least one contact providing an electrical connection through the semiconductor material to a front side of the backside patterned metal layer. The backside patterned metal layer is between a wafer and one of the semiconductor material and an insulator layer.

Active x-ray attack prevention device

Fabrication methods and device structures for a silicon controlled rectifier. A cathode is arranged over a top surface of a substrate and a well is arranged beneath the top surface of the substrate. The cathode is composed of a semiconductor material having a first conductivity type, and the well also has the first conductivity type. A semiconductor layer, which has a second conductivity type opposite to the first conductivity type, includes a section over the top surface of the substrate. The section of the semiconductor layer is arranged to form an anode that adjoins the well along a junction.

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Essex Junction, VT, United States of America

Ajay Raman