Viavi Solutions Suzhou Co., Ltd.

Ailing Ding

Markus K Tilsch

Yinxiang Xia

Weibin Huang

In some implementations, a wafer holder apparatus includes a jig structure to receive a wafer, wherein the jig structure includes a first angled surface with respect to a nominal coating plane; and a spring structure to compress an end of the wafer against the first angled surface, wherein the spring structure includes: a spring; and a compression surface attached to the spring, wherein the compression surface includes a second angled surface matched to the first angled surface.

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Shanghai, China

Ailing Ding