Asml Netherlands B.v.

Carl Zeiss Smt Gmbh

Ahmet Levent Avsar

Alexander Petrus Josephus Van Lankvelt

Hubertus Renier Maria Van Lierop

Erik Roelof Loopstra

Galip Tuna Turkbey

A vibration isolator () for supporting a payload and isolating the payload from vibrations has: a pressurized gas compartment () formed with a rigid base structure (), which base structure has an opening () covered with a flexible membrane () having an inner surface () facing into the gas compartment and an outer surface () facing in the opposite direction, a support member () for supporting the payload, which support member is arranged in contact with the outer surface () of the membrane, and a clamping member () arranged at the inner surface () of the membrane, wherein the support member and the clamping member form a clamping system (), which system includes at least one magnetic element () effecting the membrane to be pressed against the support member.

Growing community of inventors

Veldhoven, Netherlands

Ahmet Levent Avsar