The United States of America as Represented by the Department of Energy

Ahmed Hassanein

Zeke Insepov

Isak Konkashbaev

Bryan J Rice

The present invention relates generally to the field of small scale pumping and, more specifically, to a method and system for very small scale pumping media through microtubes. One preferred embodiment of the invention generally comprises: method for small scale pumping, comprising the following steps: providing one or more media; providing one or more microtubes, the one or more tubes having a first end and a second end, wherein said first end of one or more tubes is in contact with the media; and creating surface waves on the tubes, wherein at least a portion of the media is pumped through the tube.

Method and system for small scale pumping

The present invention relates generally to the field of nanotechnology, carbon nanotubes and, more specifically, to a method and system for nano-pumping media through carbon nanotubes. One preferred embodiment of the invention generally comprises: method for nano-pumping, comprising the following steps: providing one or more media; providing one or more carbon nanotubes, the one or more nanotubes having a first end and a second end, wherein said first end of one or more nanotubes is in contact with the media; and creating surface waves on the carbon nanotubes, wherein at least a portion of the media is pumped through the nanotube.

Method for nano-pumping using carbon nanotubes

A device and method for generating extremely short-wave ultraviolet electromagnetic wave, utilizing a theta pinch plasma generator to produce electromagnetic radiation in the range of 10 to 20 nm. The device comprises an axially aligned open-ended pinch chamber defining a plasma zone adapted to contain a plasma generating gas within the plasma zone; a means for generating a magnetic field radially outward of the open-ended pinch chamber to produce a discharge plasma from the plasma generating gas, thereby producing a electromagnetic wave in the extreme ultraviolet range; a collecting means in optical communication with the pinch chamber to collect the electromagnetic radiation; and focusing means in optical communication with the collecting means to concentrate the electromagnetic radiation.

Method for plasma formation for extreme ultraviolet lithography-theta pinch

A device and method for generating extremely short-wave ultraviolet electromagnetic wave uses two intersecting plasma beams generated by two plasma accelerators. The intersection of the two plasma beams emits electromagnetic radiation and in particular radiation in the extreme ultraviolet wavelength. In the preferred orientation two axially aligned counter streaming plasmas collide to produce an intense source of electromagnetic radiation at the 13.5 nm wavelength. The Mather type plasma accelerators can utilize tin, or lithium covered electrodes. Tin, lithium or xenon can be used as the photon emitting gas source.

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Bolingbrook, IL, United States of America

Ahmed Hassanein