Samsung Electronics Co., Ltd.

Ah-reum Ji

Jeong-yun Lee

Geum-jung Seong

Bo-ra Lim

A semiconductor device includes a substrate having a fin active region pattern having a protruding shape, a device isolation layer pattern covering a side surface of a lower portion of the fin active region pattern, a spacer pattern covering a side surface of a portion of the fin active region pattern that protrudes from a top surface of the device isolation layer pattern, and a source/drain region in contact with a top surface of the fin active region pattern and a top surface of the spacer pattern.

Growing community of inventors

Hwaseong-si, South Korea

Ah-reum Ji