Intel Corporation

Georgia Tech Research Corporation

Agnes M Padovani

Paul Albert Kohl

Thomas K Gaylord

James D Meindl

Elias N Glytsis

Tony Mule′

Sue Ann B Allen

A substrate imprint tool is provided with a light transparent base and a light blocking distal end that is coupled to the light transparent base.

Light transparent substrate imprint tool with light blocking distal end

Waveguides and methods of fabrication thereof are presented. A representative waveguide includes a waveguide core and a cladding layer, where the cladding layer surrounds the waveguide core. The waveguide core and cladding can be made of a host material having a plurality of nano-pores, wherein the nano-pores include a sacrificial material, and the sacrificial material can be selectively decomposed in both the core and cladding layers to form a plurality of nano air-gaps.

Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof

Growing community of inventors

Phoenix, AZ, United States of America

Agnes M Padovani