Sciosense B.v.

Ams Ag

Agata Sakic

Nebojsa Nenadovic

Hilco Suy

Frederik Willem Maurits Vanhelmont

Frans De Jong

Geert Calaerts

Hans Ten Cate

Renie De Kok

Micha In't Zandt

Andreis Valter

Roel Daamen

Guido Stefanuto

In an embodiment a method for calibrating temperature sensors includes arranging devices-under-test (DUTs) in a sealable and thermally isolated chamber of a calibration arrangement such that each of the DUTs is in proximity to, associated to and in thermal contact with at least one of a number of reference samples, controlling the calibration arrangement to thermalize the DUTs and the reference samples to a temperature set point and generating, based on a temperature-dependent quantity, a set of measurement signals for each of the DUTs, wherein each set of measurement signals comprises a test measurement signal from a distinct one of the DUTs and a reference measurement signal from each of an associated at least one of the reference samples.

Arrangement and method for calibrating temperature sensors

A sensor device includes a first sensor including a heating element configured to heat up the first sensor in a controllable manner and a second sensor thermally coupled to the heating element of the first sensor such that the heating element is further configured to heat up the second sensor in a controllable manner.

Sensor device and method for operating a sensor device

A calibration arrangement has a sealable and thermally-isolated chamber comprising a socket mount having a number of reference samples in thermal contact with the socket mount and a number of sample sockets for devices-under test, DUTs, with each sample socket being arranged in proximity to and associated to at least one of the reference samples. The arrangement further comprises a thermal chuck and a circuit board, which is configured to provide electrical connection to the reference samples in the socket mount and DUTs in the sample sockets. The thermal chuck is configured to thermalize the socket mount and the circuit board to a temperature set point.

The sensor semiconductor device comprises a substrate () with a main surface (), a sensor region () on or above the main surface, a coating layer () above the main surface, and a trench () formed in the coating layer around the sensor region. The trench provides drainage of a liquid from the coating layer.

Sensor semiconductor device and method of producing a sensor semiconductor device

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Eindhoven, Netherlands

Agata Sakic