Asml Netherlands B.v.

Adrianus Marinus Wouter Heeren

Hendrikus Johannes Schellens

Bo Lenssen

Erik Henricus Egidius Catharina Eummelen

Rogier Hendrikus Magdalena Cortie

Koen Cuypers

Stef Marten Johan Janssens

Sudhir Srivastava

Theodorus Johannes Antonius Renckens

Theodorus Petrus Maria Cadee

Jan Van Eijk

Ruud Antonius Catharina Maria Beerens

Jeroen Gerard Gosen

Johannes Antonius Gerardus Akkermans

Richard Henricus Adrianus Van Lieshout

Sander Christiaan Broers

Jeroen Johannes Theodorus Hendrikus De Best

George Alois Leonie Leenknegt

Peter Van Der Krieken

A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the member relative to the opening, wherein the linkage mechanism comprises a frame attached to a wall and fixed at a first end in relation to the passageway, a portion of the frame moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the movable portion such that an expansion of the piezo actuator results in movement of the movable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the member.

Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus

A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.

Sensor, object positioning system, lithographic apparatus and device manufacturing method

Growing community of inventors

St. Willebrord, Netherlands

Adrianus Marinus Wouter Heeren