Kulicke & Soffa Liteq B.v.

Adrianus Johannes Verneer

Derk Andre Kort

Mikhail Yurlevitch Loktev

A diffuser system () and method for optically diffusing a light beam (L,L). At least two transmissive diffuser windows () are provided. The diffuser windows () are arranged to sequentially diffuse the light beam (L,L) transmitted there through. The diffuser system () is configured to continuously rotate the diffuser windows () at an angular velocity (&#x3c9;) for homogenizing a diffusive pattern of the transmitted light beam (L,L). The diffuser windows () are configured to rotate around distinct rotation axes (C,C). The distinct rotation axes (C,C) are parallel and offset with respect to each other by a radial center distance (d). A rotating subarea of the first diffuser window () partially overlaps a rotating subarea of the second rotating diffuser window () The partially overlapping rotating subareas define a beam window (W) for homogenizing and diffusing the transmitted light beam (L,L).

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Eindhoven, Netherlands

Adrianus Johannes Verneer