Kistler Holding Ag

Sensirion Holding Ag

Adrian Kummer

Christof Sonderegger

Axel Bertholds

Marco Gnielka

Andreas Hierlemann

A pressure or force sensor has a sensor housing, a measuring element in the housing, and a sensor membrane. The membrane is delimited by an inner edge and an outer edge, which is connected in a pressure-resistant manner to the sensor housing. The inner edge transitions in a pressure-resistant manner into a movable plunger, the travel of which can be detected by the measuring element. The membrane has one or more elastic regions between the outer edge and the inner edge, each region having a thinnest point, wherein the material thickness inside the elastic region increases steadily on both sides of this thinnest point. The cross-section of the membrane has an arched shape in each elastic region, and the arched shape has a convex outer and concave inner contour relative to the arch orientation.

Sensor membrane

The invention relates to an optical pressure sensor based on light intensity measurements and comprises at least one membrane and two parallel optical fibers. At least one first fiber has a fiber end and a light emission surface for emitting light in the direction of the membrane. At least one second fiber has a fiber end having a light admission surface for receiving the light reflected from the membrane and transmitting that reflected light. The light emission surface and the light admission surface of the two fibers are disposed facing away from each other. This changes the optical path of the light during use such that the light portion received by the at least one second fiber is very sensitive to the position of the membrane.

Growing community of inventors

Zurich, Switzerland

Adrian Kummer