Inter Science Gmbh

Adolfo O Gutierrez

Steven Charles Aceto

Christopher Cormeau

Michelle D Simkulet

James T Woo

Daniel M Edmans

Edward Maby

An improved microsystems testing and characterization system which allows the system user to identify specific structures, and thereby to initiate an automated testing sequence to be applied to that structure or a series of structures. The integrated control system that governs the present invention automates the power supply to the device under test, the precision motion control of all components, the sensor operation, data processing and data presentation. Therefore operation is autonomous once the microstructure is in place and the testing sequence is specified. The integrated testing system can be used to perform tests on an entire wafer or on a single die.

Microsystems integrated testing and characterization system and method

A microelectromechanical power relay uses mercury, or a similar liquid metal with high surface tension, as a flexible non-degrading contact mechanism. The basic systematic requirements for the micro-relay include large current carrying capacity, high speed, use of control voltages readily available in the given application, and an acceptable hold-off voltage. The preferred embodiment of the present invention includes the novel configuration of a liquid metal current carrying switching device.

Microelectromechanical liquid metal current carrying system, apparatus and method

An improved microsystems testing and characterization system which allows the system user to identify specific structures, and thereby to initiate an automated testing sequence to be applied to that structure or a series of structures. The integrated control system that governs the present invention automates the power supply to the device, the precision motion control of all components, the sensor operation, data processing and data presentation. Therefore operation is autonomous once the microstructure is in place and the testing sequence is specified. The integrated testing system can be used to perform tests on an entire wafer or on a single die.

This invention relates to an apparatus for making highly sensitive differential measurements of acceleration. The vibration sensor includes the use of moveable gate field effect transistors to sense the motion of a cantilever beam relative to the motion sensed by a reference structure, it also includes an actuator element formed by a pair of electrodes actuating electrostatically on the beam. A feedback control loop is also included for force balance operation resulting in a very wide dynamic range for the sensor.

Differential wideband vibration

This invention relates to an apparatus for making highly sensitive measurements of acceleration. The vibration sensor includes the use of a movable gate field effect transistor to sense the motion of a cantilever beam with respect to its base, it also includes an actuator element formed by a pair of electrodes actuating electrostatically on the beam. A feedback control loop is also included for force balance operation resulting in a very wide dynamic range for the sensor.

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Troy, NY, United States of America

Adolfo O Gutierrez