Fei Comapny

Aditee Shrotre

Brian Routh, Jr

Brad Larson

Thomas Gary Miller

Richard J Young

John F Flanagan, Iv

Oleg Sidorov

Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.

Artificial intelligence-enabled preparation end-pointing

Apparatuses and methods directed toward endpoint detection are disclosed herein. An example method at least includes forming a plurality of lines on a top surface of a sample; removing, a plurality of times, material from a working surface of the sample, the working surface different than the top surface; imaging, a plurality of times, the sample to at least capture the plurality of lines; and determining an endpoint based on a relative spatial characteristic between two or more lines of the plurality of lines.

Line-based endpoint detection

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Mountain View, CA, United States of America

Aditee Shrotre