The Royal Institution for the Advancement of Learning / Mcgill University

My01 IP Holdings Inc.

Adel Merdassi

Vamsy Chodavarapu

Charles Allan

Daisy Daivasagaya

MEMS based sensors, particularly capacitive sensors, potentially can address critical considerations for users including accuracy, repeatability, long-term stability, ease of calibration, resistance to chemical and physical contaminants, size, packaging, and cost effectiveness. Accordingly, it would be beneficial to exploit MEMS processes that allow for manufacturability and integration of resonator elements into cavities within the MEMS sensor that are at low pressure allowing high quality factor resonators and absolute pressure sensors to be implemented. Embodiments of the invention provide capacitive sensors and MEMS elements that can be implemented directly above silicon CMOS electronics.

Methods and devices for microelectromechanical pressure sensors

Chemical sensors today are deployed in massive volumes across multiple industries and yet at the same time they are subject to substantial research and development effort to establish new, faster, lower cost, more accurate, more sensitive chemical sensors. Such sensors and sensor arrays are being exploited across chemistry, biology, clinical biology, environmental science in civilian and military markets. Amongst the many sensor methodologies are xerogel substrates with two moieties, a receptor for molecular recognition of the analyte and a luminophore for signaling the recognition event. In order to fulfill the requirements for low cost there is a requirement for electronic excitation/read circuits that can support architectures with optical source&#x2014;N sensors&#x2014;X filters&#x2014;M detectors, where M&#x2265;N and X=N|M. According to embodiments of the invention electronic excitation/read circuits for phase based luminophore sensors are presented that are compatible with single CMOS chip implementation and monolithic integration of the optical excitation/detection elements.

Growing community of inventors

Montreal, Canada

Adel Merdassi