Photon Dynamics, Inc.

Wdi Wise Device Inc.

Photon Dynamics Canada Inc.

Mds Inc.

Image Processing Systems Inc.

Adam Weiss

Alexandre Obotnine

Afsar Saranli

David L Baldwin

Eduardo C Ghelman

Oleksiy Lopatin

Aleksey Lopatin

David P Thomas

Andrew Lasinski

A method and system for automated in-line inspection of optically transparent material is disclosed herein. The method includes illuminating a top and bottom surface of the optically transparent material with at least one sheet of light and then generating an image based on light that is received by an imaging device. The image that is generated may either be a bright field image or a dark field image.

Method and apparatus for automated in-line inspection of optically transparent materials

The invention is directed at a method and system of detecting defects in a transparent media such as a piece of glass. The method comprises the steps of transmitting light from a light source towards the transparent media and then detecting defects in the transparent media by scanning the light as it is reflected or passes through the transparent media. The method and system may operate in any one of a dark field mode, a bright field mode for scanning or a bright field mode for inspecting.

Optical inspection of flat media using direct image technology

The invention is directed at a method and apparatus for auto-focusing an infinity corrected microscope. Light beams are directed and then converged towards a specimen of interest and at least one image is formed from the reflected light. The image, or images, are then reviewed and calibration measurements are retrieved from the image. These calibration measurement are then used to determine focusing measurements which are used to auto-focus the microscope.

Method and apparatus for the auto-focussing infinity corrected microscopes

A concurrent low resolution/high resolution parallel scanning system and method are provided as an improvement in the scanning process of an inspection system for planar objects, such as large flat plates employed in panel displays, whereby lower resolution defect detection efficiently overlaps and parallels higher resolution defect review and classification stages in which defects are automatically defined and resolved. Although the invention is a valid solution for the more general problem of optically inspecting the surface of a flat article for defects, the invention is particularly useful for detecting pattern defects on large glass plates deposited with integrated-circuits for forming LCD flat panel displays.

Method and apparatus for flat patterned media inspection

A tracking auto-focus system maintains a microscope pointed at a TFT array continuously in focus so as to eliminate the auto-focusing time that would otherwise be required. The tracking auto-focus system includes, in part, a microscope Z actuator, an auto-focus sensor, an analog-to-digital converter (ADC), a signal conditioner, a digital proportional integrating and differentiating (PID) controller, and a digital-to-analog converter. The actuator adjusts the distance between the microscope's objective lens and the target and includes, in part, an amplifier, a linear motor, and a linear encoder which provides positional feedback. The auto-focus sensor together with the ADC and signal conditioner continuously monitor and detect the distance between the microscope's objective lens and the target and supply the measured distance to the amplifier. The PID controller together with the DAC stabilizes the distance separating the microscope's objective lens and the target to maintain the best focus.

Tracking auto focus system

In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering

A modular split-axis stage is used to inspect and/or repair large flat glass media suitable for LCD/TFT applications. Low-precision air table sections are detachably mounted to a centrally located, high-precision granite inspection/repair section. Glass media held by a vacuum contact is transported on air cushions from the up-web air table to the central inspection/repair section. Vacuum nozzles integrated with porous medium pads precisely control the height of the flexible media above the central section during inspection or repair. Embodiments includes structures in which the media is either stationary or moving during inspection/repair. A first media can be loaded/unloaded while a second media is undergoing inspection or repair in a pipelined operational mode.

High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing

In an inspection system for electrical and electro-optical inspection of TFT-LCD panels, a fine resolution area imaging camera with a pulse illumination source disposed to scan the region and operative capture images of the region illuminated with pulses of short illumination and automatically maintained in focus while continuously scanning in order to resolve points of defects.

Inspection of TFT LCD panels using on-demand automated optical inspection sub-system

A sample introduction device for introducing a plurality of independent fluid sample streams into a mass spectrometer includes a manifold () having a plurality of fluid sample stream direct paths. Each direct path extends between a fluid sample stream inlet () and a fluid sample stream outlet. A plurality of bypass paths () is also provided in the manifold. Each bypass path is coupled to a respective one of the direct paths between the inlet and outlet. A plurality of transfer lines () is also provided with each transfer line being coupled to a respective one of the outlets to deliver a fluid sample stream to an ionization region of the mass spectrometer. A valve () is positioned in each of the bypass paths and is actuable to divert the fluid sample stream entering the direct path via the inlet from the direct path and into the bypass path.

Sample introduction device for mass spectrometry using a fast fluidic system to synchronize multiple parallel liquid sample streams

Apparatus and a method for the detection and identification of light diverting and transparent defects with optical properties in a transparent medium. The apparatus has a light source with an aperture stop, a lens system focusing an image of the aperture stop at a plane, and means to pass the transparent medium through said column of light. The apparatus and method provide dark view images of the defects. The apparatus and method may be combined with a viewing area inspection system. The transparent medium may be curved, and especially face plates for cathode ray tubes.

Dark view inspection system for transparent media

Apparatus and a method for the detection and identification of defects in a transparent medium, especially light diverting and transparent defects with optical properties. The apparatus comprises an extended source of illumination, first and second optical recording devices, and a means to pass the transparent medium between the extended source of illumination and the first and second optical recording devices. The first and second optical recording devices are disposed to record images at opposed acute angles from a common location on the transparent medium. The second optical recording device has two sources of laser illumination attached thereto, which are directed at the common location in a spaced apart relationship such that scattered of laser light from surfaces of the transparent medium is recorded by the first optical recording device.

Stereo vision inspection system for transparent media

An inspection system for the edge of a sheet of glass e.g. automobile glass. The system has at least one laser, with the laser beam directed at the edge of the glass. Light reflected from the edge is recorded e.g. with a camera. The path length from the laser to the glass edge and back to the camera is maintained constant as the glass moves through the apparatus.

Inspection system for edges of glass

An inspection system for a sheet of glass. The system comprises a first laser and a second laser, each of which provide a sheet of light, a cylindrical lens system, and a first light detection system and a second light detection system. The first laser is located at the focal point of the lens system. The second laser is located at a distance from the lens system that is greater than that of the first laser, and off of the axis of the lens system. The first light detection system receives light from the first laser and the second light detection system receives light from the second laser. The inspection system is adapted to position a sheet of glass between the lens system and the detection systems. A method is also described.

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Pickering, Canada

Adam Weiss