Asml Netherlands B.v.

Adam Lassise

Arno Jan Bleeker

Pieter Willem Herman De Jager

Albertus Victor Gerardus Mangnus

Maikel Robert Goosen

Erwin Paul Smakman

Yan Ren

Apparatuses and methods for charged-particle detection may include a deflector system configured to direct charged-particle pulses, a detector having a detection element configured to detect the charged-particle pulses, and a controller having a circuitry configured to control the deflector system to direct a first and second charged-particle pulses to the detection element; obtain first and second timestamps associated with when the first charged-particle pulse is directed by the deflector system and detected by the detection element, respectively, and third and fourth timestamps associated with when the second charged-particle pulse is directed by the deflector system and detected by the detection element, respectively; and identify a first and second exiting beams based on the first and second timestamps, and the third and fourth timestamps, respectively.

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Den Bosch, Netherlands

Adam Lassise