Veeco Instruments Inc.

Abraham J Navy

Alan V Hayes

Emmanuel N Lakios

Victor Kanarov

Roger P Fremgen, Jr

Edward W Ostan

John Jacob

Genrikh Treyger

Hari S Hegde

Roger P Fremgen

Mihai S Risca

An electromagnetic field generator and method of operation for ion beam deposition of magnetic thin-film materials is presented. A combination of open frame electromagnetic field generator elements provides precise control of magnetic field directionality. This control enables deposition of oriented magnetic films with minimal directionality error. The magnetic field direction may be oriented to enable the deposition of alternating layers of directionally oriented magnetic films. An open frame element reduces the weight of the electromagnetic field generator while truncated corners reduce diagonal clearance that may be required in a vacuum chamber. An open frame design also enables the electromagnetic field generator to surround and thus remain clear of the active deposition area; the electromagnetic field generator can thus be shielded from accumulation of sputtered material. Shielding from accumulation of sputter material reduces maintenance requirements.

Electromagnetic field generator and method of operation

A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam &ldquo;on&rdquo; and beam &ldquo;off&rdquo; states is presented. The process and control system provide very precise control of the duration of the charged-particle extraction.

Charged-particle source, control system and process using gating to extract the charged particle beam

A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam 'on' and beam 'off' states is presented. The process and control system provide very precise control of the duration of the charged-particle extraction.

Charged-particle source, control system, and process using gating to

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Bellerose, NY, United States of America

Abraham J Navy