Airmems

Abedel Halim Zahr

Romain Stefanini

Ling Yan Zhang

Pierre Blondy

A micro-electromechanical-system (MEMS) switch () is formed in a substrate () and includes a first RF signal line () and a second RF signal line (), a deformable membrane (), an activator () configured to deform the membrane (), a substrate track, and a membrane track. The RF signal lines () are connected by one of the membrane track and the substrate track. A membrane RF ground () is integrated into the membrane (), and the membrane RF ground is electrically connected to a substrate RF ground (), the membrane RF ground framing and being formed parallel to at least one among the membrane track () and the substrate track, such that the RF ground () closely follows the RF signal path, in order to guide the propagation of the RF signal of the first RF signal line () to the second RF signal line () when the switch is in the on state.

MEMS membrane with integrated transmission line

A microelectromechanical system switch includes a signal input line, a signal output line, a deformable conducting membrane electrically connected to the signal output line and including a contact dimple facing the signal input line, and an actuation electrode. The membrane has a planar round shape, with a radial opening in the direction of the signal input line, narrowing from the periphery towards the center of the membrane, the contact dimple being formed in the central region of the membrane, the actuation electrode has the same shape as the membrane, and the gap between the membrane, facing the actuation electrode, and the actuation electrode is an airgap only.

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Limoges, France

Abedel Halim Zahr