Leland Stanford Junior University

Ernst Leitz Wetzlar Gmbh

Other

Abdullah Atalar

Calvin F Quate

Hayrettin Koymen

Olav Solgaard

Ozgur Sahin

Herbert Fischbach

Butrus Thomas Khuri-Yakub

F Levent Degertekin

Stephen C Minne

Fahrettin Levent Degertekin

Arif Sanli Ergun

Scott R Manalis

B T Khuri-Yakub

Mehmet Yilmaz

Dieter Huelsmann

Hayrettin Koeymen

Itir Koymen

Akif Sinan Tasdelen

Some preferred embodiments include a microphone system for receiving sound waves, the microphone including a back plate, a radiation plate, first and second electrodes, first and second insulator layers, a power source and a microphone controller. The radiation plate is clamped to the back plate so that there is a hermetically sealed regular convex polygon-, ellipse-, or regular convex elliptic polygon-shaped gap between the radiation plate and the back plate. The first electrode is fixedly attached to a side of the back plate proximate to the gap. The second electrode is fixedly attached to a side of the radiation plate. The insulator layers are attached to the back plate and/or the radiation plate, on respective gap sides thereof, so that the insulator layers are between the electrodes. The microphone controller is configured to use the power source to drive the microphone at a selected operating point comprising normalized static mechanical force, bias voltage, and relative bias voltage level. Relevant dimensions of the gap, and a thickness of the radiation plate, are determined using the selected operating point so that a sensitivity of the microphone at the selected operating point is an optimum sensitivity for the selected operating point.

High performance sealed-gap capacitive microphone with various gap geometries

Some preferred embodiments include a microphone system for receiving sound waves, the microphone including a back plate, a radiation plate, first and second electrodes, first and second insulator layers, a power source and a microphone controller. The radiation plate is clamped to the back plate so that there is a hermetically sealed circular gap between the radiation plate and the back plate. The first electrode is fixedly attached to a side of the back plate proximate to the gap. The second electrode is fixedly attached to a side of the radiation plate. The insulator layers are attached to the back plate and/or the radiation plate, on respective gap sides thereof, so that the insulator layers are between the electrodes. The microphone controller is configured to use the power source to drive the microphone at a selected operating point comprising normalized static mechanical force, bias voltage, and relative bias voltage level. A radius and height of the gap, and a thickness of the radiation plate, are determined using the selected operating point so that a sensitivity of the microphone at the selected operating point is an optimum sensitivity for the selected operating point.

High performance sealed-gap capacitive microphone

A harmonic cantilever for use in an atomic force microscope includes a cantilever arm and a probe tip. The cantilever arm has a shape selected to tune the fundamental resonance frequency or a resonance frequency of a selected higher order mode so that the fundamental and higher-order resonance frequencies have an integer ratio or near integer ratio. In one embodiment, the cantilever arm can be shaped to tune the fundamental resonance frequency. Alternately, the cantilever arm can include a geometric feature for tuning the resonance frequency of the fundamental mode or the selected higher order mode. An imaging method using the harmonic cantilever is disclosed whereby signals at the higher harmonics are measured to determine the material properties of a sample. In other embodiment, a cantilever includes a probe tip positioned at a location of minimum displacement of unwanted harmonics for suppressing signals associated with the unwanted harmonics.

Harmonic cantilevers and imaging methods for atomic force microscopy

A harmonic cantilever for use in a tapping-mode atomic force microscope includes a cantilever arm and a probe tip. The cantilever arm has a shape selected to tune the fundamental resonance frequency or a resonance frequency of a selected higher order mode so that the fundamental and higher-order resonance frequencies have an integer ratio or near integer ratio. In one embodiment, the cantilever arm can be shaped to tune the fundamental resonance frequency. Alternately, the cantilever arm can include a geometric feature for tuning the resonance frequency of the fundamental mode or the selected higher order mode. An imaging method using the harmonic cantilever is disclosed whereby signals at the higher harmonics are measured to determine the material properties of a sample. In other embodiment, a cantilever includes a probe tip positioned at a location of minimum displacement of unwanted harmonics for suppressing signals associated with the unwanted harmonics.

A wide frequency band micromachined microphone including a plurality of micromachined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described. A method of operating a microphone array is also described.

Wide frequency band micromachined capacitive microphone/hydrophone and method

A method is disclosed for selecting characteristics (i.e. thickness-frequency product, length and material) of leakage plates used in ultrasonic transducers that transfer ultrasonic energy via leakage to fluid media with low acoustic impedances. High leakage efficiency and wide bandwidths are achieved by exciting the low order antisymmetric Lamb wave mode (A0) at the selected frequency in the leakage plate. Various actuator configurations that can be used to excite and detect the A0 mode in the leakage plate are described. Some embodiments employ reflector structures to intercept the leaky waves and reform them into beams normal to the plane of the leakage plate.

Micromachined ultrasonic leaky wave air transducers

A deflection sensor for a microcantilever includes two sets of interdigitated fingers, one (reference) set being attached to the substrate from which the microcantilever extends and the other (movable) set being attached to the tip of the microcantilever. Together the interdigitated fingers form an optical phase grating. The deflection of the microcantilever is measured by directing a light beam against the optical phase grating and detecting the intensity of the reflected light in the first (or other) component of the resulting diffraction pattern. As the microcantilever deflects, the reference and movable fingers move relative to one another creating large variations in the intensity of the zeroth and first order components of the diffraction pattern. To eliminate '1/f' noise the deflection of the microcantilever can be measured using an AC signal.

Interdigital deflection sensor for microcantilevers

A conical ultrasonic wave deflection system has an ultrasonic transducer for ultrasonic microscopy using surface waves and/or Lamb waves in an object. A conical wave front is directed onto the object via a deflection element. An inactive axial circular disk is provided between the ultrasonic transducer and the object to minimize unnecessary interference from undeflected waves. A frustoconical lens with a blocked top face, or a conical metal reflector with a ring transducer on the transducer side can be provided as the deflection element. The arrangement is highly compatible with ultrasonic microscopes. Matching to a critical angle .theta. of the object is achieved by selection of the appropriate ultrasonic frequency.

Conical ultrasonic wave deflection system

An acoustic lens arrangement having at least one transducer for the generation and/or for the reception of a plane acoustic wavefield. The arrangement includes a focusing surface for focusing the acoustic wavefield in an object region and at least one medium for the low-loss transmission of the acoustic wavefield between a transducer, the focusing surface and the object region to be investigated. The longitudinal axis of the focusing surface is inclined relative to the direction of the normal to the acoustic wavefield in such a manner that when the longitudinal axis is positioned normal to the surface of the object region, the acoustic beams incident thereon form a critical angle .theta..sub.R with the normal to the surface of the object.

Acoustic lens arrangement

Wide-band network for matching a signal-conducting line having a characteristic impedance of 50 ohms to a piezoelectric transmitter having a capacitance C.sub.o and a reactance X.sub.o for a center frequency f.sub.o of the frequency band to be transmitted. Various circuit arrangements and dimensioning rules for the circuit elements are specified as a function of the reactance X.sub.o. The transmitter is a part of an acoustic lens arrangement.

Wide-band matching network for piezoelectric transducer

A circuit arrangement for separating high-frequency pulses produced successively in time at a piezoelectric transducer of an acoustic reflection lens arrangement. According to the invention, the transducer is preceded by a three-way pin switch, the common end of the wiper of which is connected to the acoustic lens, the other end of the wiper being alternately connected in a first position to the output of a transducer oscillator, in a second position to a 50-Ohm resistor, or in a third position to a measurement circuit.

Circuit arrangement for separating high-frequency pulses generated by an

Method and apparatus for detecting the distance between an ultrasonic objective and an object to be imaged in order to prevent contact between the two. For this purpose, light rays, after entering into an immersion means (water) between the objective and the object, being reflected by the object, and emanating from the immersion means are fed through the ultrasonic objective to a photo-receiver and converted into electric signals. The front face of the lens body of the ultrasonic objective is provided with an opaque ring zone. This arrangement makes it possible simultaneously to illuminate the object.

Method and apparatus for detecting the distance between an object and an

A method for representing elastic parameters of object surfaces by scanning the object surface with a focused acoustic beam and detection of the interferences between the ultrasonic beams specularly reflected at the object surface and the ultrasonic beams emitted from the object surface after excitation of surface waves in which either two raster-shaped scannings of the object surface are carried out at different focus positions relative to the object surface or successive scannings are carried out with acoustic beams of different frequency. Reflection signals associated with identical raster points form a difference signal which is used for representing the image.

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Ankara, Turkey

Abdullah Atalar