Fei Comapny

Abdul Raffey Faruqi

Joeri Lof

Frank Jeroen Pieter Schuurmans

Richard Henderson

Michael Alwin William Stekelenburg

Gerrit Cornelis Van Hoften

Nicola Carlo Guerrini

Gregory James McMullan

Renato Andrea Danilo Turchetta

In a direct electron detector, backscattering of electrons into the detector volume from below the sensor is prevented. In some embodiments, an empty space is maintained below the sensor. In other embodiments, a structure below the sensor includes geometry, such as multiple high aspects ratio channels, either extending to or from the sensor to trap electrons, or a structure of angled surfaces to deflect the electrons that pass through the sensor.

Backscatter reduction in thin electron detectors

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Cambridge, United Kingdom

Abdul Raffey Faruqi