Jds Uniphase Corporation

Lumentum Operations LLC

Other

Abdul Jaleel K Moidu

John Michael Miller

Wenlin Jin

Paul Colbourne

Sheldon McLaughlin

Nenad Duricic

Keith Anderson

William Thomas Moore

A component assembly includes a first component, such as an optical component, and a second component, such as a support component, having different coefficients of thermal expansion (CTEs). The component assembly also includes a spacer having a CTE matched to that of the first component, disposed between the first component and the second component. When the CTE of the first component is greater than that of the second component, the second component includes a protrusion, and the spacer includes a complementary opening for receiving the protrusion, such that a joint between the protrusion and the complementary opening is under compressive stress. The spacer also includes a mounting area for receiving the first component, and an air gap disposed between the first component and the protrusion.

Assembly of components having different coefficients of thermal expansion

Micro-electro-mechanical system (MEMS) mirror devices and manufacturing methods thereof. The device comprising a hinge layer having orthogonal tilt and roll hinges connecting inner and outer platforms such that the inner platform has bi-directional rotation. An electrode layer connected beneath the hinge layer controls rotation of the platforms. A mirror layer above the hinge layer comprises a mirror connected to the inner platform via a pedestal and fixed membrane connected to the hinge layer but detached from the mirror. An anchor temporarily reduces movement of the outer platform during fabrication. In a fabrication state, the anchor anchors the outer platform to the mirror layer's fixed membrane. In a post-fabrication state, a gap releases the outer platform.

Hidden hinge MEMS with temporary gimbal anchor

A dual enclosure including an inner housing inside an outer housing is provided for an optical bench supporting a plurality of optical elements. An air gap is provided between the inner and outer housings. The inner housing may act as a heat spreader for isothermal operation, and the outer housing may act as a heat insulator. The optical bench may be disposed within the inner housing on a supporting element or elements, which thermally and mechanically decouple the optical bench from the inner housing.

Optomechanical assembly

An optical switching device including an optical switching engine may be packaged by omitting an optical bench and disposing optical elements directly on a base of a housing of the optical switching device. The optical switching engine may be disposed on a ceramic portion of the base, and thermally matched to the ceramic base. The base may be reinforced by the housing walls and optional internal rigidity ribs. The optical elements may be thermally matched to the base, and the lid may be strain relieved by thinning lid edges. The housing may be mounted to an external chassis using soft grummets.

Optical switching device

A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) including a coarsely aligned orthogonal vertical comb drive and/or parallel plate actuator. Each micro-mirror in the MEMS linear piano micro-mirror array comprises a reflective body/mirror layer, a ground/hinge layer and a hot electrode/substrate layer. To increase the amount of surface area available for the hot and ground electrodes, the dimensions of the ground/hinge layer are extended longitudinally or laterally across the air gap between reflective layers to beneath the adjacent reflective layer. Ideally, diffraction patterns are formed on the surface of the ground/hinge layer to prevent stray light from reflecting back into the system.

Biaxial MEMS mirror with hidden hinge and staggered electrodes

A micro-mirror includes stiffer end sections for limiting curvature, and thin middle sections forming ground electrodes and a hinge. Spacers arc provided beneath the thin middle sections of the micro-mirror for supporting hot electrodes, which attract the ground electrodes for rotating the micro-mirror about a tilt axis. The spacers enable the gap between the hot electrode and the micro-mirror to be designed separately from the thickness of the micro-mirror, and the gap between the ends of the micro-mirror and the substrate.

Micro-mirror with electrode spacer

A MEMS mirror is disclosed having thickness correlated with the intensity profile of an impinging optical beam, so as to reduce moment of inertia of the MEMS mirror while preserving optical quality of the reflected beam. It is the mirror edges that contribute the most to the moment of inertia, while it is generally the mirror center that contributes the most to a reduction of the quality of an optical beam reflected from the mirror. Accordingly, by providing a mirror having laterally varying thickness matched to the local variation of the intensity of the optical beam, the quality of the latter may be preserved while the moment of inertia of the mirror may be significantly reduced. The thickness of MEMS mirrors may be varied continuously or stepwise; in one direction or in two mutually orthogonal directions.

Tiltable MEMS mirror

A tiltable MEMS device is disclosed having an asymmetric, electrostatically actuated tiltable platform and a reflector mounted on the platform so that the platform is hidden below the reflector, except for a portion of long side of the platform extending from under the reflector. An electrostatic stator actuator is mounted on the substrate under the long side of the tiltable platform. The range of a unidirectional tilt is increased by providing a recess in the substrate under the extended portion of the platform to accommodate the increased range of movement of the tiltable platform.

Pivotable MEMS device

The invention relates to a hermetic feedthrough of an optical fiber into a package for an optical module, that includes a package ferrule hermetically attached to the package or integral therewith, a fiber ferrule hermetically sealed around the optical fiber, and a compression sleeve hermetically sealed around the package ferrule. The compression sleeve is hermetically sealed to the fiber ferrule or integral therewith, and wherein a coefficient of thermal expansion (CTE) of the compression sleeve is greater than a CTE of the package ferrule so that a joint between the compression sleeve and the package ferrule is under compressive stress.

Hermetic seal between a package and an optical fiber

A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. The present invention relates to a micro-mirror in a MEMS linear piano micro-mirror array comprising a micro-mirror layer, a hinge layer and an electrode/substrate layer. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.

Counter-balanced MEMS mirror with hidden hinge

An electrostatic comb actuator having reduced in-plane rotation of a tiltable element is disclosed. The actuator has a stator comb electrode and a tiltable rotor comb electrode. The rotor comb electrode fingers extend from an anchor wall running parallel to the axis of rotation of the rotor at a first distance from the axis of rotation. The rotor comb electrode fingers extend towards the axis of rotation for a length that is smaller than the first distance. The stator electrodes are shifted towards the axis of rotation, so that the stator electrode fingers are only partially overlapping with the rotor electrodes fingers.

Electrostatic comb actuator

A two-axis tiltable linear array of MEMS micromirrors is described. The individual micromirrors of the array are flexibly suspended over a common substrate by using two pairs of serpentine hinges coupled by a gimbal ring and are actuated by using tilt and roll electrodes. The tilt actuator regions of the micromirrors are disposed within the gimbal rings, the roll hinges connecting the tilt actuator regions to the micromirrors, which provides for decoupling of the tilt and the roll of the micromirror. The structure allows for considerable decoupling of the tilt and the roll and, or the pistoning effects observed upon micromirror actuation. The structure is suitable for application in a wavelength selective optical switch.

MEMS device and a MEMS device array

A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. Each micro-mirror in the MEMS linear piano micro-mirror array comprises a micro-mirror layer, a hinge layer and an electrode/substrate layer. Preferably, the roll and tilt electrodes are substantially disposed along the roll axis to provide a high fill factor. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.

Growing community of inventors

Nepean, Canada

Abdul Jaleel K Moidu