Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Mapper Lithography IP B.v. (1 from 172 patents)
1 patent:
1. 9240306 - Device for spot size measurement at wafer level using a knife edge and a method for manufacturing such a device