Asml Netherlands B.v.

Abdelhamid Kechroud

Peter Michel Silvester Maria Heijmans

Henrikus Herman Marie Cox

Sven Antoin Johan Hol

Johannes Hubertus Antonius Van De Rijdt

Fidelus Adrianus Boon

Godfried Katharina Hubertus Franciscus Geelen

Hendrikus Pascal Gerardus Johannes Van Agtmaal

Mark Marcus Gerardus Heeren

Jacob Jan Velten

An electromagnetic actuator includes a coil assembly including a coil; a magnet assembly including a first and a second magnet unit, each magnet unit including a magnetic yoke and a plurality of permanent magnets mounted to the magnetic yoke, the first and second magnet unit forming a magnetic circuit for receiving the coil assembly and, upon energizing the coil, generating a force in a first direction; and a holder for holding the magnet units, wherein a weight ratio of the magnet assembly over the coil assembly is smaller than the weight ratio of the magnet assembly over the coil assembly when the ratio of force over electrical power is maximized.

Lithographic apparatus and device manufacturing method

A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first outer subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second outer subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between the first outer subsidiary magnet system and the second outer subsidiary magnet system in the second direction is substantially zero.

Lithographic apparatus and lorentz actuator

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Eindhoven, Netherlands

Abdelhamid Kechroud