Xerox Corporation

Conduent Business Services, LLC

Mks Instruments, Inc.

The Penn State Research Foundation

Lam Research Corporation

Palo Alto Research Corporation Incorporated

Aaron Michael Burry

Peter Paul

Vladimir Kozitsky

Bruce Earl Thayer

Michael F Zona

Orhan Bulan

Eric Scott Hamby

Aaron T Radomski

Palghat Srinivas Ramesh

Zhigang Fan

Raja Bala

Edgar A Bernal

Robert P Loce

Claude Fillion

Mariusz Oldziej

Daniel M Bray

Larry J Fisk, Ii

Vishal Monga

Paul C Julien

Christopher Auguste Dirubio

Jonathan W Smyka

Ross Reinhardt

Xuan Mo

Christopher A Dirubio

William C Dean

Joseph C Sheflin

Gary Walker Skinner

Jesse N Klein

Yusuf Oguzhan Artan

Julianna Elizabeth Lin

Benjamin J Gitlin

Matthew G Harrington

Wencheng Wu

John Patrick Holland

Howard A Mizes

Alexei Marakhtanov

Eric Michael Gross

Gerald M Fletcher

Felix Leib Kozakevich

Yonghui Zhao

Jack Thomas Lestrange

Ky Thoai Luu

Ranadeep Bhowmick

Bing Ji

Amish Rughoonundon

Stuart Alan Schweid

Kenny-Tuan Dinh

Eliud Robles Flores

Matthew Adam Shreve

Robert Michael Lofthus

Jack T LeStrange

Martin Edward Hoover

Kristine A German

Michael D Thompson

Thomas F Wade

Donald M Bott

Abu Saeed Islam

Richard W Seyfried

Martin Krucinski

Bruce J Parks

Karl Edwin Kurz

Qun Li

Charles Anthony Radulski

Daniel S Hann

Markus P Fromherz

Dusan G Lysy

Robert E Rosdahl, Jr

William Joseph Hannaway

Osman Todd Polatkan

Antonio DeCrescentis

Chithralekha Balamurugan

Alex Scott Brougham

Jose Antonio Rodriguez-Serrano

Surendar Jeyadev

Nischal M Piratla

Fei Xiao

Joseph M Antonio

Stephen P Hoover

Robert J Mead

Aung Toe

Mark Cantelli

John Deppen

David Martin Todd Jackson

Linnell Martinez

Frank Bradley Mayberry

Arko Barman

William Lee Kennedy

David Chuang

Michael Kirk

Farnaz Abtahi

Scott White

A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted over a predetermined number of bins. The parameter is adjusted in accordance with a cost function, and the cost function is determined by introducing a perturbation for each bin into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal. The perturbation is determined in accordance with a basis set having fewer dimensions than the number of bins.

Enhanced tuning methods for mitigating RF load impedance variations due to periodic disturbances

A RF generator includes a RF power source configured to generate an output signal at an output frequency, and an extremum-seeking frequency controller configured to generate a frequency control signal. The frequency control signal varies the output frequency of the RF power source, and the frequency control signal is formed from a gradient signal. The RF generator further includes a gradient estimator configured to generate the gradient signal. A frequency of the frequency control signal is adjusted based on the gradient signal. The gradient estimator is configured to receive frequency values of the frequency control signal and corresponding output response values, and the gradient signal is generated based on the frequency values and the output response values. Other example RF generators, methods for extremum-seeking frequency control of a RF generator, and control systems for controlling a RF generator are also disclosed.

Extremum-seeking control apparatuses and methods for automatic frequency tuning

A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.

Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances

A radio frequency (RF) generator includes a RF power source configured to output an RF power signal, and a controller coupled to the RF power source. The controller is configured to generate a pulse to modulate the RF power signal of the RF power source. The pulse includes one or more state transitions. The controller is further configured to receive a sync signal indicative of one or more operating characteristics or parameters of another RF generator, and adjust at least one of the state transitions of the pulse to synchronize the state transition with a defined phase of the received sync signal. Other example RF generators, RF power delivery systems including one or more RF generators, and control methods for adjusting a state transition of a pulse to synchronize the state transition with a defined phase of a sync signal are also disclosed.

Pulse and bias synchronization methods and systems

A power supply system includes a RF power source configured to generate an output signal at an output frequency, a signal source configured to generate a perturbation signal, an extremum seeking frequency controller configured to generate a frequency control signal based on the perturbation signal, and a frequency selector configured to select a perturbation frequency of the perturbation signal that is isolated from at least one frequency tone associated with the power supply system. The frequency control signal varies the output frequency of the RF power source. Other example power supply system, methods for controlling a RF generator, and control systems for controlling a RF generator are also disclosed.

Extremum seeking control apparatuses with online parameter adjustment and methods

A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.

High speed synchronization of plasma source/bias power delivery

A RF generator includes a RF power source and a RF control module coupled to the RF power source. The RF control module is configured to generate at least one control signal to vary a respective at least one of an RF output signal from the RF power source or an impedance between the RF power source and a load. The RF output signal includes a RF signal modulated by a pulse signal, and the RF control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the RF output signal or the impedance between the RF power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.

Adaptive pulse shaping with post match sensor

An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.

System and method for arc detection using a bias RF generator signal

A radio frequency (RF) generator is configured to generate a RF signal. The RF signal can be modulated by a pulse having one or multiple states. During an initial state at pulse initiation, the RF generator adjusts the impedance match by selecting the frequency of the RF signal. During a second state of the pulse, the RF generator adjusts the impedance match using a matching network. The first state includes controlling the RF generator to output a power burst, and the second state includes controlling the generator to output an operating power.

Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applications

A method, non-transitory computer readable medium and apparatus for performing a person re-identification using an overhead view image are disclosed. For example, the method includes receiving a plurality of overhead view images, detecting a target person in one or more of the plurality of overhead view images, creating a probe image of the target person, receiving a selection of the probe image containing the target person, selecting one or more of the plurality of processed images that has a similar distortion profile as a distortion profile of the probe image based on a radial distance of the target person from a center of a respective overhead view image of the plurality overhead view images used to generate the probe image and performing the person-re-identification of the target person using the one or more of the plurality of processed images that are selected.

System and method for person re-identification using overhead view images

According to exemplary methods, automated image processing of images from order locations of a multi-lane drive-thru system is continually performed using an automated ordering system. It is automatically determined if a vehicle is present at any of the order locations based on the automated image processing. It is automatically determined if an order has been initiated into the automated ordering system. When the order has been initiated while the vehicle is present at any of the order locations, an automated sequencing processing is automatically begun. The automated sequencing processing determines an order pick-up sequence for picking up orders at pickup windows of the multi-lane drive-thru system. When the order has been initiated while the vehicle is not present at any of the order locations, a potential out-of-sequence warning is automatically associated with the order and output from the automated ordering system.

System and method for lane merge sequencing in drive-thru restaurant applications

A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.

Pulsed, bidirectional radio frequency source/load

A radio frequency (RF) generator includes a RF power source configured to generate an output signal at an output frequency. The RF generator includes a frequency tuning module. The frequency tuning module generates a frequency control signal that controls the output frequency of the RF power source. The frequency control signal includes a frequency tuning signal component and a perturbation signal component. The perturbation signal varies an electrical parameter of the output signal. The frequency tuning signal is adjusted in accordance with a change in output signal in response to the perturbation signal.

Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matching

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Ontario, NY, United States of America

Aaron Michael Burry