Lam Research Corporation

Other

Aaron Blake Miller

Rachel E Batzer

Aaron Durbin

Vivekanandan Krishnaswamy

Showerhead for semiconductor processing

High density hole pattern dual plenum hole showerhead assembly

In its preferred embodiment this jig is a rigid foam plastic casting specific to a particular type of workpiece. It enables accurate fastening of workpiece to external structure with flathead screws. Each such workpiece has a plurality of countersunk orifices of identical size and distribution pattern. Jig and workpiece are of general rectangular plan, the jig thick enough to allow for integral functional guide holes. Jig is fitted to workpiece and the associated two held against an external structure while pilot holes are drilled into the structure through the jig guide holes centered with respect to the workpiece orifices. Proper orientation of jig to workpiece is obtained and maintained by a plurality of truncated conical protuberances on the jig extending from one of its two major parallel surfaces. These protuberances are complementary in shape and distribution pattern to the countersunk orifices of the workpiece. When protuberances are severally and simultaneously fitted into orifices, that surface of the jig from which the protuberances extend will be juxtaposed and common to that surface of the workpiece exhibiting contersunk recesses. This insures proper orientation and inherent stability during drilling of pilot holes. Where the jig substance permits, grooves are provided to allow breaking cleanly into several parts, if desired, each part constituting one jig with one protuberance.

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West Linn, OR, United States of America

Aaron Blake Miller