Paul Roman

Title: Paul Roman - Innovator in Micro-Electrical-Mechanical Systems

Introduction

Paul Roman is a notable inventor based in Whitehall, PA (US). He has made significant contributions to the field of micro-electrical-mechanical systems (MEMS). His innovative work has led to the development of a unique patent that addresses challenges in the etching process of MEMS devices.

Latest Patents

Paul Roman holds a patent for "Selective etching of oxides from substrates." This invention presents a method and system for the release etching of a MEMS device from a substrate. The method involves supporting a substrate with a sacrificial oxide and a non-sacrificial material in a process chamber. It includes introducing a gas phase mixture containing a halide and an alcohol vapor, followed by etching the sacrificial oxide with this mixture. This innovative approach enhances the efficiency and effectiveness of MEMS device fabrication.

Career Highlights

Paul Roman is currently associated with Primaxx, Inc., where he continues to push the boundaries of technology in MEMS. His work has been instrumental in advancing the capabilities of microfabrication techniques. With a focus on practical applications, he has contributed to the development of systems that improve manufacturing processes.

Collaborations

Throughout his career, Paul has collaborated with talented individuals such as Paul D Mumbauer and Robert W Grant. These partnerships have fostered an environment of innovation and creativity, leading to advancements in their respective fields.

Conclusion

Paul Roman's contributions to the field of micro-electrical-mechanical systems through his patent and work at Primaxx, Inc. highlight his role as a key innovator. His dedication to improving MEMS technology continues to influence the industry positively.