Lina Zhu

Title: Innovations by Inventor Lina Zhu

Introduction

Lina Zhu is a prominent inventor based in San Jose, California. She has made significant contributions to the field of semiconductor technology, holding two patents that showcase her innovative approach to solving complex engineering challenges.

Latest Patents

Lina Zhu's latest patents include a method titled "Delicate Dry Clean." This method describes a technique for selectively removing fluorocarbon layers from overlying low-k dielectric material. The process involves sequential exposure to a local plasma formed from a silicon-fluorine precursor, followed by exposure to plasma effluents formed in a remote plasma from a fluorine-containing precursor. This innovative approach avoids exposing the low-k dielectric material to oxygen, which could undesirably increase its dielectric constant.

Another notable patent is the "Silicon Oxide Recess Etch." This method allows for more homogeneous etch rates across varying patterns on a patterned substrate. It provides a more rectilinear profile following the etch process. The method includes a sequential exposure of gapfill silicon oxide to a local plasma treatment prior to a remote-plasma dry etch. This conditioning of the gapfill silicon oxide ensures that the etch process proceeds at a more even rate within each trench and across multiple trenches.

Career Highlights

Lina Zhu is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. Her work focuses on developing advanced techniques that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Lina collaborates with talented professionals in her field, including Sean S. Kang and Srinivas D. Nemani. These collaborations contribute to the innovative environment at Applied Materials, Inc., fostering advancements in semiconductor technology.

Conclusion

Lina Zhu's contributions to the field of semiconductor technology through her patents demonstrate her expertise and innovative spirit. Her work continues to influence the industry, paving the way for future advancements.