Ki Yung Lee

Title: Ki Yung Lee: Innovator in Substrate Treatment Technologies

Introduction

Ki Yung Lee is a prominent inventor based in Suwon-si, South Korea. He has made significant contributions to the field of substrate treatment technologies, holding a total of 3 patents. His work focuses on developing advanced methods and apparatuses that enhance the efficiency and effectiveness of substrate treatment processes.

Latest Patents

Ki Yung Lee's latest patents include innovative technologies such as a substrate treating method and a substrate treating apparatus. The apparatus features a chamber with a treating space designed for substrate treatment. It includes a substrate support unit that holds the substrate in place, a gas supply unit that introduces gas into the treating space, and a plasma source that generates plasma from the supplied gas. Notably, the gas supply unit is equipped with a shower head unit positioned at the top of the chamber, which has multiple discharge holes for gas distribution. Additionally, the gas block supplies gas to partitioned regions within the shower head unit at varying flow rates.

Another significant patent is an apparatus and method for treating substrates. This apparatus includes a substrate supporting unit that utilizes electrostatic force to secure the substrate. It also features a plasma generating unit that produces discharging plasma to eliminate the substrate's charge. The power supplying unit is responsible for delivering power to both the substrate supporting unit and the plasma generating unit, employing a fluctuating power pattern during the discharge process.

Career Highlights

Ki Yung Lee is currently employed at Semes Co., Ltd., where he continues to innovate in the field of substrate treatment. His expertise and dedication to advancing technology have positioned him as a key figure in his industry.

Collaborations

One of his notable collaborators is Dongbock Lee, with whom he has worked on various projects related to substrate treatment technologies.

Conclusion

Ki Yung Lee's contributions to substrate treatment technologies through his patents and work at Semes Co., Ltd. highlight his role as an influential inventor in this specialized field. His innovative approaches continue to shape the future of substrate treatment processes.