Douglas Detert

Title: Douglas Detert: Innovator in Plasma Processing Technology

Introduction

Douglas Detert is a notable inventor based in Fremont, CA (US). He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique component that enhances the efficiency and effectiveness of plasma processing chambers.

Latest Patents

Douglas Detert holds a patent for a "Single crystal metal oxide plasma chamber component." This invention features a component of a plasma processing chamber that includes at least one plasma-facing surface made from single crystal metal oxide material. The component can be machined from a single crystal metal oxide ingot. Suitable materials for this invention include spinel, yttrium oxide, and yttrium aluminum garnet (YAG). Additionally, a single crystal metal oxide can be machined to form a gas injector for a plasma processing chamber. He has 1 patent to his name.

Career Highlights

Douglas Detert is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in plasma processing technology.

Collaborations

Some of his notable coworkers include Lin Xu and John Edward Daugherty. Their collaboration has fostered an environment of innovation and creativity within the company.

Conclusion

Douglas Detert's contributions to plasma processing technology exemplify the impact of innovative thinking in the field. His patent for a single crystal metal oxide plasma chamber component showcases his commitment to advancing technology in the semiconductor industry.