Most Cited Patents
July 23, 2023

3,562 citations – Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby.
Date of Patent: Jul. 22, 2008
Inventors: David H. Levy, Andrea C. Scuderi, Lyn M. Irving.
A thin film transistor is made with a zinc-oxide-containing semiconductor material and can include two electrodes. The process for fabricating this transistor device involves keeping the substrate temperature below 300°C during fabrication.
3,560 citations – Transistor using an isovalent semiconductor oxide as the active channel layer.
Date of Patent: Dec. 09, 2008
Inventors: Randy L. Hoffman, Gregory S. Herman.
A semiconductor device can include a channel including an oxide comprising a combination of isovalent cations selected from within the D block and the P block of the Periodic Table.